On-chip Testing and Properties of MEMS Materials: Size Scale Effects

Horacio D. Espinosa, S. Berbinni, M. Panico, B. Peng

Research output: Chapter in Book/Report/Conference proceedingEntry for encyclopedia/dictionary

Original languageEnglish
Title of host publicationEncyclopedia of Materials
Subtitle of host publicationScience and Technology
EditorsPatrick Veyssiere
PublisherElsevier
StatePublished - 2006

Cite this

Espinosa, H. D., Berbinni, S., Panico, M., & Peng, B. (2006). On-chip Testing and Properties of MEMS Materials: Size Scale Effects. In P. Veyssiere (Ed.), Encyclopedia of Materials: Science and Technology Elsevier.
Espinosa, Horacio D. ; Berbinni, S. ; Panico, M. ; Peng, B. / On-chip Testing and Properties of MEMS Materials : Size Scale Effects. Encyclopedia of Materials: Science and Technology. editor / Patrick Veyssiere. Elsevier, 2006.
@inbook{5f1f2b02b1e8480fabe998af5a4d3ebf,
title = "On-chip Testing and Properties of MEMS Materials: Size Scale Effects",
author = "Espinosa, {Horacio D.} and S. Berbinni and M. Panico and B. Peng",
year = "2006",
language = "English",
editor = "Patrick Veyssiere",
booktitle = "Encyclopedia of Materials",
publisher = "Elsevier",

}

Espinosa, HD, Berbinni, S, Panico, M & Peng, B 2006, On-chip Testing and Properties of MEMS Materials: Size Scale Effects. in P Veyssiere (ed.), Encyclopedia of Materials: Science and Technology. Elsevier.

On-chip Testing and Properties of MEMS Materials : Size Scale Effects. / Espinosa, Horacio D.; Berbinni, S.; Panico, M.; Peng, B.

Encyclopedia of Materials: Science and Technology. ed. / Patrick Veyssiere. Elsevier, 2006.

Research output: Chapter in Book/Report/Conference proceedingEntry for encyclopedia/dictionary

TY - CHAP

T1 - On-chip Testing and Properties of MEMS Materials

T2 - Size Scale Effects

AU - Espinosa, Horacio D.

AU - Berbinni, S.

AU - Panico, M.

AU - Peng, B.

PY - 2006

Y1 - 2006

M3 - Entry for encyclopedia/dictionary

BT - Encyclopedia of Materials

A2 - Veyssiere, Patrick

PB - Elsevier

ER -

Espinosa HD, Berbinni S, Panico M, Peng B. On-chip Testing and Properties of MEMS Materials: Size Scale Effects. In Veyssiere P, editor, Encyclopedia of Materials: Science and Technology. Elsevier. 2006