On-chip Testing and Properties of MEMS Materials: Size Scale Effects

Horacio D. Espinosa, S. Berbinni, M. Panico, B. Peng

Research output: Chapter in Book/Report/Conference proceedingEntry for encyclopedia/dictionary

Original languageEnglish
Title of host publicationEncyclopedia of Materials
Subtitle of host publicationScience and Technology
EditorsPatrick Veyssiere
PublisherElsevier
StatePublished - 2006

Cite this

Espinosa, H. D., Berbinni, S., Panico, M., & Peng, B. (2006). On-chip Testing and Properties of MEMS Materials: Size Scale Effects. In P. Veyssiere (Ed.), Encyclopedia of Materials: Science and Technology Elsevier.