On-chip Testing and Properties of MEMS Materials: Size Scale Effects

Horacio D. Espinosa, S. Berbinni, M. Panico, B. Peng

Research output: Chapter in Book/Report/Conference proceedingEntry for encyclopedia/dictionary

Original languageEnglish
Title of host publicationEncyclopedia of Materials
Subtitle of host publicationScience and Technology
EditorsPatrick Veyssiere
PublisherElsevier
StatePublished - 2006

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