On comparison of the temperature sensitivity of SU-8-based triple-arm MZI against straight rib optical waveguides patterned on silicon wafer

I. S. Amiri*, M. M. Ariannejad, M. Ghasemi, A. Dehzangi, H. Ahmad, P. Yupapin

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

This study is performed to investigate the temperature sensitivity of SU-8-based triple-arm Mach–Zehnder interferometer (MZI) and straight waveguide. The proposed SU-8 2000-based rib waveguides are fabricated on a silicon wafer with 1.5-μm SiO 2 thermal oxide layer. SU-8 layer of desired thickness is spin-coated onto the silicon wafer followed by patterning of the SU-8 waveguides. Temperature sensitivity of both waveguides is evaluated using the same heating source and under the same environmental conditions. Measurement results show that complex triple-arm MZI having different arm lengths offers a less linear sensitivity compared to the simple straight waveguide.

Original languageEnglish (US)
Pages (from-to)385-391
Number of pages7
JournalIndian Journal of Physics
Volume93
Issue number3
DOIs
StatePublished - Mar 4 2019

Keywords

  • 07.07.Df
  • 42.79.Pw
  • 42.82.Et
  • Mach–Zehnder interferometer (MZI)
  • Optical sensors
  • Optical waveguides
  • SU-8
  • Temperature sensitivity

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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