On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

Amir Hosseini; David Kwong; Yang Zhang; Saurabh A. Chandorkar; Filip Crnogorac; Andrew Carlson; Babak Fallah; Seth Bank; Emanuel Tutuc; John Rogers; R. Fabian W Pease; Ray T. Chen

doi:10.1116/1.3511508

On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

Amir Hosseini^*, David Kwong, Yang Zhang, Saurabh A. Chandorkar, Filip Crnogorac, Andrew Carlson, Babak Fallah, Seth Bank, Emanuel Tutuc, John Rogers, R. Fabian W Pease, Ray T. Chen

^*Corresponding author for this work

Materials Science and Engineering

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10 Scopus citations

Abstract

In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.

Original language	English (US)
Pages (from-to)	C6O1-C6O7
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	28
Issue number	6
DOIs	https://doi.org/10.1116/1.3511508
State	Published - Nov 2010

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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10.1116/1.3511508

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Hosseini, A., Kwong, D., Zhang, Y., Chandorkar, S. A., Crnogorac, F., Carlson, A., Fallah, B., Bank, S., Tutuc, E., Rogers, J., Pease, R. F. W., & Chen, R. T. (2010). On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 28(6), C6O1-C6O7. https://doi.org/10.1116/1.3511508

Hosseini, Amir ; Kwong, David ; Zhang, Yang ; Chandorkar, Saurabh A. ; Crnogorac, Filip ; Carlson, Andrew ; Fallah, Babak ; Bank, Seth ; Tutuc, Emanuel ; Rogers, John ; Pease, R. Fabian W ; Chen, Ray T. / On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems. In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2010 ; Vol. 28, No. 6. pp. C6O1-C6O7.

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title = "On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems",

abstract = "In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.",

author = "Amir Hosseini and David Kwong and Yang Zhang and Chandorkar, {Saurabh A.} and Filip Crnogorac and Andrew Carlson and Babak Fallah and Seth Bank and Emanuel Tutuc and John Rogers and Pease, {R. Fabian W} and Chen, {Ray T.}",

note = "Funding Information: This research is supported by the Multi-disciplinary University Research Initiative (MURI) program through the AFOSR (Contract No. FA 9550-08-1-0394).",

year = "2010",

month = nov,

doi = "10.1116/1.3511508",

language = "English (US)",

volume = "28",

pages = "C6O1--C6O7",

journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",

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Hosseini, A, Kwong, D, Zhang, Y, Chandorkar, SA, Crnogorac, F, Carlson, A, Fallah, B, Bank, S, Tutuc, E, Rogers, J, Pease, RFW & Chen, RT 2010, 'On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems', Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, vol. 28, no. 6, pp. C6O1-C6O7. https://doi.org/10.1116/1.3511508

On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems. / Hosseini, Amir; Kwong, David; Zhang, Yang; Chandorkar, Saurabh A.; Crnogorac, Filip; Carlson, Andrew; Fallah, Babak; Bank, Seth; Tutuc, Emanuel; Rogers, John; Pease, R. Fabian W; Chen, Ray T.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 28, No. 6, 11.2010, p. C6O1-C6O7.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

AU - Hosseini, Amir

AU - Kwong, David

AU - Zhang, Yang

AU - Chandorkar, Saurabh A.

AU - Crnogorac, Filip

AU - Carlson, Andrew

AU - Fallah, Babak

AU - Bank, Seth

AU - Tutuc, Emanuel

AU - Rogers, John

AU - Pease, R. Fabian W

AU - Chen, Ray T.

N1 - Funding Information: This research is supported by the Multi-disciplinary University Research Initiative (MURI) program through the AFOSR (Contract No. FA 9550-08-1-0394).

PY - 2010/11

Y1 - 2010/11

N2 - In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.

AB - In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.

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On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

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