On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems

Amir Hosseini*, David Kwong, Yang Zhang, Saurabh A. Chandorkar, Filip Crnogorac, Andrew Carlson, Babak Fallah, Seth Bank, Emanuel Tutuc, John Rogers, R. Fabian W Pease, Ray T. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.

Original languageEnglish (US)
Pages (from-to)C6O1-C6O7
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume28
Issue number6
DOIs
StatePublished - Nov 2010

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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