Abstract
In this article, the authors present and discuss the fabrication of three-dimensional (3D) optical phased array (OPA) devices for large angle, two-dimensional optical beam steering. Fabrication of a single layer (one-dimensional) OPA prototype for one-dimensional beam steering on silicon nanomembrane is presented. The authors present different approaches, such as nanoimprint lithography, optical lithography, and self-aligned patterning of multibonded silicon-on-insulator wafers, for the realization of 3D OPA devices in particular and 3D photonic circuits in general. At the end, the authors discuss the challenges and potential solutions.
Original language | English (US) |
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Pages (from-to) | C6O1-C6O7 |
Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
Volume | 28 |
Issue number | 6 |
DOIs | |
State | Published - Nov 2010 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry