On the Microstructure, Chemistry, and Dielectric Function of BaTiO3MOCVD Thin Films

V. P. Dravid; H. Zhang; L. A. Wills; B. W. Wessels

doi:10.1557/JMR.1994.0426

On the Microstructure, Chemistry, and Dielectric Function of BaTiO₃MOCVD Thin Films

V. P. Dravid, H. Zhang, L. A. Wills, B. W. Wessels

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

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Abstract

Thin films of BaTiO3 deposited on (100)LaAlO3 substrate by metal-organic chemical vapor deposition (MOCVD) are investigated using several electron-optical techniques. Combined high resolution transmission electron microscopy (HRTEM), electron energy loss spectrometry (EELS), and convergent beam electron diffraction (CBED) indicate a substantial influence of lattice strain on the structural and optical characteristics of BaTiO3 films. Spatially resolved EELS and CBED studies indicate that the substrate influence persists up to about 40 nm away from the interface. The changes in the dielectric function of the films, as inferred from spatially resolved EELS, appear to correlate well with internal lattice strain in the films as deduced from convergent beam electron diffraction (CBED).

Original language	English (US)
Pages (from-to)	426-430
Number of pages	5
Journal	Journal of Materials Research
Volume	9
Issue number	2
DOIs	https://doi.org/10.1557/JMR.1994.0426
State	Published - Oct 1994

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "On the Microstructure, Chemistry, and Dielectric Function of BaTiO3MOCVD Thin Films",

abstract = "Thin films of BaTiO3 deposited on (100)LaAlO3 substrate by metal-organic chemical vapor deposition (MOCVD) are investigated using several electron-optical techniques. Combined high resolution transmission electron microscopy (HRTEM), electron energy loss spectrometry (EELS), and convergent beam electron diffraction (CBED) indicate a substantial influence of lattice strain on the structural and optical characteristics of BaTiO3 films. Spatially resolved EELS and CBED studies indicate that the substrate influence persists up to about 40 nm away from the interface. The changes in the dielectric function of the films, as inferred from spatially resolved EELS, appear to correlate well with internal lattice strain in the films as deduced from convergent beam electron diffraction (CBED).",

author = "Dravid, {V. P.} and H. Zhang and Wills, {L. A.} and Wessels, {B. W.}",

note = "Funding Information: This research was supported by the MRL Program of the National Science Foundation, at the Materials Research Center of Northwestern University, under Award No. DMR-9120521, and the Department of Energy under Grant No. DE-FG02-92ER45475 (VPD) and DE-FG02-85ER45209 (LAW and BWW).",

year = "1994",

month = oct,

doi = "10.1557/JMR.1994.0426",

language = "English (US)",

volume = "9",

pages = "426--430",

journal = "Journal of Materials Research",

issn = "0884-2914",

publisher = "Materials Research Society",

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T1 - On the Microstructure, Chemistry, and Dielectric Function of BaTiO3MOCVD Thin Films

AU - Dravid, V. P.

AU - Zhang, H.

AU - Wills, L. A.

AU - Wessels, B. W.

N1 - Funding Information: This research was supported by the MRL Program of the National Science Foundation, at the Materials Research Center of Northwestern University, under Award No. DMR-9120521, and the Department of Energy under Grant No. DE-FG02-92ER45475 (VPD) and DE-FG02-85ER45209 (LAW and BWW).

PY - 1994/10

Y1 - 1994/10

N2 - Thin films of BaTiO3 deposited on (100)LaAlO3 substrate by metal-organic chemical vapor deposition (MOCVD) are investigated using several electron-optical techniques. Combined high resolution transmission electron microscopy (HRTEM), electron energy loss spectrometry (EELS), and convergent beam electron diffraction (CBED) indicate a substantial influence of lattice strain on the structural and optical characteristics of BaTiO3 films. Spatially resolved EELS and CBED studies indicate that the substrate influence persists up to about 40 nm away from the interface. The changes in the dielectric function of the films, as inferred from spatially resolved EELS, appear to correlate well with internal lattice strain in the films as deduced from convergent beam electron diffraction (CBED).

AB - Thin films of BaTiO3 deposited on (100)LaAlO3 substrate by metal-organic chemical vapor deposition (MOCVD) are investigated using several electron-optical techniques. Combined high resolution transmission electron microscopy (HRTEM), electron energy loss spectrometry (EELS), and convergent beam electron diffraction (CBED) indicate a substantial influence of lattice strain on the structural and optical characteristics of BaTiO3 films. Spatially resolved EELS and CBED studies indicate that the substrate influence persists up to about 40 nm away from the interface. The changes in the dielectric function of the films, as inferred from spatially resolved EELS, appear to correlate well with internal lattice strain in the films as deduced from convergent beam electron diffraction (CBED).

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On the Microstructure, Chemistry, and Dielectric Function of BaTiO₃MOCVD Thin Films

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