Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Chunhan Hseih*, Fang Ou, Fei Yi, Seng-Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2012
StatePublished - Dec 1 2012
EventCLEO: Science and Innovations, CLEO_SI 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Other

OtherCLEO: Science and Innovations, CLEO_SI 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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    Hseih, C., Ou, F., Yi, F., & Ho, S-T. (2012). Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide. In CLEO: Science and Innovations, CLEO_SI 2012