Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Chunhan Hseih*, Fang Ou, Fei Yi, Seng-Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O 3 as transparent electrodes for InP based optoelectronic devices.

Original languageEnglish (US)
Title of host publication2012 Conference on Lasers and Electro-Optics, CLEO 2012
StatePublished - Dec 6 2012
Event2012 Conference on Lasers and Electro-Optics, CLEO 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Other

Other2012 Conference on Lasers and Electro-Optics, CLEO 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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    Hseih, C., Ou, F., Yi, F., & Ho, S-T. (2012). Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide. In 2012 Conference on Lasers and Electro-Optics, CLEO 2012 [6326359]