Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Chunhan Hseih; Fang Ou; Fei Yi; Seng Tiong Ho

doi:10.1364/cleo_at.2012.jth2a.66

Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Chunhan Hseih^*, Fang Ou, Fei Yi, Seng Tiong Ho

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Applications and Technology, CLEO_AT 2012
Publisher	Optical Society of America (OSA)
Pages	JTh2A.66
ISBN (Print)	9781557529435
DOIs	https://doi.org/10.1364/cleo_at.2012.jth2a.66
State	Published - 2012
Event	CLEO: Applications and Technology, CLEO_AT 2012 - San Jose, CA, United States Duration: May 6 2012 → May 11 2012

Publication series

Name	CLEO: Applications and Technology, CLEO_AT 2012

Other

Other	CLEO: Applications and Technology, CLEO_AT 2012
Country/Territory	United States
City	San Jose, CA
Period	5/6/12 → 5/11/12

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials

Access to Document

10.1364/cleo_at.2012.jth2a.66

Cite this

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title = "Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide",

abstract = "We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.",

author = "Chunhan Hseih and Fang Ou and Fei Yi and Ho, {Seng Tiong}",

year = "2012",

doi = "10.1364/cleo_at.2012.jth2a.66",

language = "English (US)",

isbn = "9781557529435",

series = "CLEO: Applications and Technology, CLEO_AT 2012",

publisher = "Optical Society of America (OSA)",

pages = "JTh2A.66",

booktitle = "CLEO",

note = "CLEO: Applications and Technology, CLEO_AT 2012 ; Conference date: 06-05-2012 Through 11-05-2012",

}

Hseih, C, Ou, F, Yi, F & Ho, ST 2012, Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide. in CLEO: Applications and Technology, CLEO_AT 2012. CLEO: Applications and Technology, CLEO_AT 2012, Optical Society of America (OSA), pp. JTh2A.66, CLEO: Applications and Technology, CLEO_AT 2012, San Jose, CA, United States, 5/6/12. https://doi.org/10.1364/cleo_at.2012.jth2a.66

Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide. / Hseih, Chunhan; Ou, Fang; Yi, Fei et al.
CLEO: Applications and Technology, CLEO_AT 2012. Optical Society of America (OSA), 2012. p. JTh2A.66 (CLEO: Applications and Technology, CLEO_AT 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

AU - Hseih, Chunhan

AU - Ou, Fang

AU - Yi, Fei

AU - Ho, Seng Tiong

PY - 2012

Y1 - 2012

N2 - We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

AB - We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

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DO - 10.1364/cleo_at.2012.jth2a.66

M3 - Conference contribution

AN - SCOPUS:84890615525

SN - 9781557529435

T3 - CLEO: Applications and Technology, CLEO_AT 2012

SP - JTh2A.66

BT - CLEO

PB - Optical Society of America (OSA)

T2 - CLEO: Applications and Technology, CLEO_AT 2012

Y2 - 6 May 2012 through 11 May 2012

ER -

Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Abstract

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ASJC Scopus subject areas

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