Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

Chunhan Hseih, Fang Ou, Fei Yi, Seng Tiong Ho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

Original languageEnglish (US)
Title of host publicationQuantum Electronics and Laser Science Conference, QELS 2012
StatePublished - Dec 1 2012
EventQuantum Electronics and Laser Science Conference, QELS 2012 - San Jose, CA, United States
Duration: May 6 2012May 11 2012

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherQuantum Electronics and Laser Science Conference, QELS 2012
CountryUnited States
CitySan Jose, CA
Period5/6/125/11/12

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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