Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Sung Jun Jang; Alireza Bonakdar; Hooman Mohseni

doi:10.1117/12.2062301

Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Sung Jun Jang, Alireza Bonakdar, Hooman Mohseni

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.

Original language	English (US)
Title of host publication	Nanostructured Thin Films VII
Publisher	SPIE
Volume	9172
ISBN (Electronic)	9781628411997
DOIs	https://doi.org/10.1117/12.2062301
State	Published - Jan 1 2014
Event	Nanostructured Thin Films VII - San Diego, United States Duration: Aug 20 2014 → Aug 21 2014

Other

Other	Nanostructured Thin Films VII
Country/Territory	United States
City	San Diego
Period	8/20/14 → 8/21/14

Keywords

evaporation
metallic nano-structures
Oblique angle deposition
transparent metallic film

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.2062301

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@inproceedings{b4b31b48e9144486bdf8d69bcca88cde,

title = "Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition",

abstract = "Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.",

keywords = "evaporation, metallic nano-structures, Oblique angle deposition, transparent metallic film",

author = "Jang, {Sung Jun} and Alireza Bonakdar and Hooman Mohseni",

year = "2014",

month = jan,

day = "1",

doi = "10.1117/12.2062301",

language = "English (US)",

volume = "9172",

booktitle = "Nanostructured Thin Films VII",

publisher = "SPIE",

address = "United States",

note = "Nanostructured Thin Films VII ; Conference date: 20-08-2014 Through 21-08-2014",

}

TY - GEN

T1 - Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

AU - Jang, Sung Jun

AU - Bonakdar, Alireza

AU - Mohseni, Hooman

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.

AB - Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nanocolumnar films depending on polarization properties, and conductivity, respectively.

KW - evaporation

KW - metallic nano-structures

KW - Oblique angle deposition

KW - transparent metallic film

UR - http://www.scopus.com/inward/record.url?scp=84937834393&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84937834393&partnerID=8YFLogxK

U2 - 10.1117/12.2062301

DO - 10.1117/12.2062301

M3 - Conference contribution

AN - SCOPUS:84937834393

VL - 9172

BT - Nanostructured Thin Films VII

PB - SPIE

T2 - Nanostructured Thin Films VII

Y2 - 20 August 2014 through 21 August 2014

ER -

Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Abstract

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Keywords

ASJC Scopus subject areas

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