BaTiO3 epitaxial films have been prepared on (001) MgO substrates by metallorganic chemical vapor deposition. The as-deposited 0.2 μm thick films had a surface roughness of 12 nm. Channel waveguides were fabricated from the films and the optical throughput measured. To differentiate the surface scattering loss from the internal scattering loss, waveguides were also prepared with a surface planarization step to reduce the surface roughness to 2.5 nm. The waveguide loss was greatly reduced for the planarized waveguides. The results indicate that surface and side wall roughness accounted for the majority of the waveguide loss. Grain boundary grooving lead to surface roughness and routes to overcome this problem are discussed.
|Original language||English (US)|
|Number of pages||6|
|Journal||Materials Research Society Symposium - Proceedings|
|State||Published - Jan 1 1997|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials