Optical surface diffraction and improved lateral resolution

W. S. Bacsa*, B. Goldberg

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optical lateral and longitudinal standing waves can be recorded using an optical scanning probe in collection mode. We describe both analytical and numerical methods to determine the image height and the location of a single point scatterer from the recorded surface diffraction image. We find that the phase of the lateral optical standing wave is minimal along the direction of the reflected beam and that the lateral standing waves are centered around the reflected beam direction. We find that the second derivative of the extracted phase peaks at the position of the point scatterer. We have estimated the image height by fitting the envelop function to the recorded intensity profile along the symmetry axis. In the intermediate distance range (several wavelengths off the surface) we can record objects of sizes smaller than the distance between the object and the image plane.

Original languageEnglish (US)
Title of host publication2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings
EditorsM. Laudon, B. Romanowicz
Pages291-294
Number of pages4
StatePublished - Dec 1 2005
Event2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 - Anaheim, CA, United States
Duration: May 8 2005May 12 2005

Other

Other2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005
CountryUnited States
CityAnaheim, CA
Period5/8/055/12/05

Keywords

  • Diffraction
  • Interference
  • Microscopy
  • Optical scanning probe
  • Surface

ASJC Scopus subject areas

  • Engineering(all)

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