Optical system for rapid materials characterization with the transient grating technique: Application to nondestructive evaluation of thin films used in microelectronics

John A. Rogers*, Martin Fuchs, Matthew J. Banet, John B. Hanselman, Randy Logan, Keith A. Nelson

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

53 Scopus citations

Abstract

This letter describes a noncontact, automated means for nondestructively measuring the physical (elastic, thermal, electronic, optical) properties of bulk samples, surfaces, supported or unsupported thin films, and multilayer assemblies. The method, which is based on the transient grating technique, uses specially constructed beam-shaping optics to manipulate excitation and probe laser beams for initiating and detecting motions in a sample. We illustrate the approach by determining the thicknesses and mechanical properties of metal films commonly used in microelectronics.

Original languageEnglish (US)
Pages (from-to)225-227
Number of pages3
JournalApplied Physics Letters
Volume71
Issue number2
DOIs
StatePublished - Jul 14 1997

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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