For dip-pen lithography (DPN), developmemt of thermally actuated probe arrays of individually addressable cantilevers were discussed. The array consists of ten probes, each of 300μm length with 100μm lateral spacing. The actuation process was done by passing 10mA of dc current through 2.1mW of heating power to the probes. It was observed that by using 1-octadecanethiol (ODT) as the ink, and a 20nm substrate of evaporated gold film on an oxidized silicon wafer, parallel writing capabilities of ten probes were demonstrated.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Feb 2 2004|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)