Parallel dip-pen nanolithography with arrays of individually addressable cantilevers

David Bullen*, Sung Wook Chung, Xuefeng Wang, Jun Zou, Chad A. Mirkin, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

101 Scopus citations

Abstract

For dip-pen lithography (DPN), developmemt of thermally actuated probe arrays of individually addressable cantilevers were discussed. The array consists of ten probes, each of 300μm length with 100μm lateral spacing. The actuation process was done by passing 10mA of dc current through 2.1mW of heating power to the probes. It was observed that by using 1-octadecanethiol (ODT) as the ink, and a 20nm substrate of evaporated gold film on an oxidized silicon wafer, parallel writing capabilities of ten probes were demonstrated.

Original languageEnglish (US)
Pages (from-to)789-791
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number5
DOIs
StatePublished - Feb 2 2004

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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