Parallel scanning probe arrays: their applications

Chang Liu*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

14 Scopus citations


Since the invention of the scanning tunneling microscope (STM)1 and the atomic force microscope (AFM)2, the field of scanning probe microscopy (SPM) instruments has grown steadily and has had a profound influence in materials research, chemistry, biology, nanotechnology, and electronics3,4. Today, scanning probe instruments are used for metrology, characterization5, detection6, manipulation7, patterning8,9, and material modification. A wide range of scanning probe applications are available, taking advantage of various modes of tip-substrate interactions, including force, optics10,11, electrochemistry12, electromagnetics, electrostatics, thermal and mass transfer13,14, and vibration15,16.

Original languageEnglish (US)
Pages (from-to)22-29
Number of pages8
JournalMaterials Today
Issue numberSUPPL.
StatePublished - 2008

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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