Parallel scanning probe arrays: their applications

Chang Liu

doi:10.1016/S1369-7021(09)70004-5

Parallel scanning probe arrays: their applications

Chang Liu^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Review article › peer-review

15 Scopus citations

Abstract

Since the invention of the scanning tunneling microscope (STM)¹ and the atomic force microscope (AFM)², the field of scanning probe microscopy (SPM) instruments has grown steadily and has had a profound influence in materials research, chemistry, biology, nanotechnology, and electronics^3,4. Today, scanning probe instruments are used for metrology, characterization⁵, detection⁶, manipulation⁷, patterning^8,9, and material modification. A wide range of scanning probe applications are available, taking advantage of various modes of tip-substrate interactions, including force, optics^10,11, electrochemistry¹², electromagnetics, electrostatics, thermal and mass transfer^13,14, and vibration^15,16.

Original language	English (US)
Pages (from-to)	22-29
Number of pages	8
Journal	Materials Today
Volume	11
Issue number	SUPPL.
DOIs	https://doi.org/10.1016/S1369-7021(09)70004-5
State	Published - 2008

Funding

Funding for the author's work is provided by the DARPA Tip Based Nanofabrication (TBNF) program. Past funding has been provided by the DARPA Advanced Lithography Program.

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/S1369-7021(09)70004-5

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title = "Parallel scanning probe arrays: their applications",

abstract = "Since the invention of the scanning tunneling microscope (STM)1 and the atomic force microscope (AFM)2, the field of scanning probe microscopy (SPM) instruments has grown steadily and has had a profound influence in materials research, chemistry, biology, nanotechnology, and electronics3,4. Today, scanning probe instruments are used for metrology, characterization5, detection6, manipulation7, patterning8,9, and material modification. A wide range of scanning probe applications are available, taking advantage of various modes of tip-substrate interactions, including force, optics10,11, electrochemistry12, electromagnetics, electrostatics, thermal and mass transfer13,14, and vibration15,16.",

author = "Chang Liu",

note = "Funding Information: Funding for the author's work is provided by the DARPA Tip Based Nanofabrication (TBNF) program. Past funding has been provided by the DARPA Advanced Lithography Program. ",

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doi = "10.1016/S1369-7021(09)70004-5",

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T2 - their applications

AU - Liu, Chang

N1 - Funding Information: Funding for the author's work is provided by the DARPA Tip Based Nanofabrication (TBNF) program. Past funding has been provided by the DARPA Advanced Lithography Program.

PY - 2008

Y1 - 2008

N2 - Since the invention of the scanning tunneling microscope (STM)1 and the atomic force microscope (AFM)2, the field of scanning probe microscopy (SPM) instruments has grown steadily and has had a profound influence in materials research, chemistry, biology, nanotechnology, and electronics3,4. Today, scanning probe instruments are used for metrology, characterization5, detection6, manipulation7, patterning8,9, and material modification. A wide range of scanning probe applications are available, taking advantage of various modes of tip-substrate interactions, including force, optics10,11, electrochemistry12, electromagnetics, electrostatics, thermal and mass transfer13,14, and vibration15,16.

AB - Since the invention of the scanning tunneling microscope (STM)1 and the atomic force microscope (AFM)2, the field of scanning probe microscopy (SPM) instruments has grown steadily and has had a profound influence in materials research, chemistry, biology, nanotechnology, and electronics3,4. Today, scanning probe instruments are used for metrology, characterization5, detection6, manipulation7, patterning8,9, and material modification. A wide range of scanning probe applications are available, taking advantage of various modes of tip-substrate interactions, including force, optics10,11, electrochemistry12, electromagnetics, electrostatics, thermal and mass transfer13,14, and vibration15,16.

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DO - 10.1016/S1369-7021(09)70004-5

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JO - Materials Today

JF - Materials Today

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Parallel scanning probe arrays: their applications

Abstract

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ASJC Scopus subject areas

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