Particles as transport carriers in CMP slurries

Daniela White*, John Parker, Shuyou Li, Vinayak Dravid

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Fingerprint

Dive into the research topics of 'Particles as transport carriers in CMP slurries'. Together they form a unique fingerprint.

Keyphrases

Material Science