Parylene surface-micromachined membranes for sensor applications

Zhifang Fan*, Jonathan M. Engel, Jack Chen, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

Original languageEnglish (US)
Pages (from-to)484-490
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume13
Issue number3
DOIs
StatePublished - Jun 1 2004

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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