Parylene surface-micromachined membranes for sensor applications

Zhifang Fan; Jonathan M. Engel; Jack Chen; Chang Liu

doi:10.1109/JMEMS.2004.825295

Parylene surface-micromachined membranes for sensor applications

Zhifang Fan^*, Jonathan M. Engel, Jack Chen, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

Original language	English (US)
Pages (from-to)	484-490
Number of pages	7
Journal	Journal of Microelectromechanical Systems
Volume	13
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2004.825295
State	Published - Jun 2004

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2004.825295

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title = "Parylene surface-micromachined membranes for sensor applications",

abstract = "This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.",

author = "Zhifang Fan and Engel, {Jonathan M.} and Jack Chen and Chang Liu",

note = "Funding Information: Manuscript received August 4, 2003; revised November 3, 2003. This work is supported by the NSF Sensitive Skin project under NSF IIS 00-80639 as well as by the AFOSR BioInspired Concept (BIC) (Program under the supervision of Lt. Col. Paul Trulove.) Subject Editor G. Stemme.",

year = "2004",

month = jun,

doi = "10.1109/JMEMS.2004.825295",

language = "English (US)",

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AU - Fan, Zhifang

AU - Engel, Jonathan M.

AU - Chen, Jack

AU - Liu, Chang

N1 - Funding Information: Manuscript received August 4, 2003; revised November 3, 2003. This work is supported by the NSF Sensitive Skin project under NSF IIS 00-80639 as well as by the AFOSR BioInspired Concept (BIC) (Program under the supervision of Lt. Col. Paul Trulove.) Subject Editor G. Stemme.

PY - 2004/6

Y1 - 2004/6

N2 - This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

AB - This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

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JF - Journal of Microelectromechanical Systems

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Parylene surface-micromachined membranes for sensor applications

Abstract

ASJC Scopus subject areas

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