This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.
|Original language||English (US)|
|Number of pages||7|
|Journal||Journal of Microelectromechanical Systems|
|State||Published - Jun 2004|
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering