Parylene surface-micromachined membranes for sensor applications

Zhifang Fan; Jonathan M. Engel; Jack Chen; Chang Liu

doi:10.1109/JMEMS.2004.825295

Parylene surface-micromachined membranes for sensor applications

Zhifang Fan^*, Jonathan M. Engel, Jack Chen, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

Original language	English (US)
Pages (from-to)	484-490
Number of pages	7
Journal	Journal of Microelectromechanical Systems
Volume	13
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2004.825295
State	Published - Jun 2004

Funding

Manuscript received August 4, 2003; revised November 3, 2003. This work is supported by the NSF Sensitive Skin project under NSF IIS 00-80639 as well as by the AFOSR BioInspired Concept (BIC) (Program under the supervision of Lt. Col. Paul Trulove.) Subject Editor G. Stemme.

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2004.825295

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title = "Parylene surface-micromachined membranes for sensor applications",

abstract = "This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.",

author = "Zhifang Fan and Engel, {Jonathan M.} and Jack Chen and Chang Liu",

note = "Funding Information: Manuscript received August 4, 2003; revised November 3, 2003. This work is supported by the NSF Sensitive Skin project under NSF IIS 00-80639 as well as by the AFOSR BioInspired Concept (BIC) (Program under the supervision of Lt. Col. Paul Trulove.) Subject Editor G. Stemme.",

year = "2004",

month = jun,

doi = "10.1109/JMEMS.2004.825295",

language = "English (US)",

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pages = "484--490",

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AU - Fan, Zhifang

AU - Engel, Jonathan M.

AU - Chen, Jack

AU - Liu, Chang

N1 - Funding Information: Manuscript received August 4, 2003; revised November 3, 2003. This work is supported by the NSF Sensitive Skin project under NSF IIS 00-80639 as well as by the AFOSR BioInspired Concept (BIC) (Program under the supervision of Lt. Col. Paul Trulove.) Subject Editor G. Stemme.

PY - 2004/6

Y1 - 2004/6

N2 - This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

AB - This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor.

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ER -

Parylene surface-micromachined membranes for sensor applications

Abstract

Funding

ASJC Scopus subject areas

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