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Pattern fidelity in nanoimprinted films using CD-SAXS
Ronald L. Jones*, Christopher L. Soles, Eric K. Lin, Walter Hu, Ronald M. Reano, Stella W. Pang, Steven J. Weigand, Denis T. Keane, John P. Quintana
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
5
Scopus
citations