Pattern fidelity in nanoimprinted films using critical dimension small angle x-ray scattering

Keyphrases

• Small-angle X-ray Scattering 100%
• Shape Fidelity 100%
• Nanoimprint Lithography 66%
• Sub-nanometer 33%
• Nanopatterning 33%
• Polymer System 33%
• Low Temperature 33%
• Metrology 33%
• Non-destructive 33%
• Non-destructive Techniques 33%
• Scattered Data 33%
• Homopolymer 33%
• Glass Transition 33%
• Cross-sectional Shape 33%
• Pattern Transfer 33%
• Sidewall Angle 33%
• Bulk Glasses 33%
• Photoresist 33%
• Dimensional Measurement 33%
• Process Quality 33%

Engineering

• Critical Dimension 100%
• Nanoimprint Lithography 66%
• Side Wall 33%
• Sectional Shape 33%
• Low-Temperature 33%
• Homopolymer 33%
• Polymer System 33%
• Pattern Transfer 33%
• Nondestructive Technique 33%
• Nanoscale 33%
• Photoresist 33%

Material Science

• Lithography 100%
• Film 100%
• Glass Transition 50%