Patterned MoS₂ nanostructures over centimeter-square areas

An approach for the generation of molybdenum disulfide nanostructures by the sulfidation of patterned sub-300 nm features of molybdenum metal was described. It was showed that soft-lithographic techniques can be used to generate patterns of MoS₂ nanostructures with controllable orientation, height, width, and shape. It was found that supporting surfaces for the nanostructures need to be stable at high temperatures, 850 °C, and toxicity of the sulfur source. The results show that careful gas-handling and proper exhaust equipment can alleviate concerns about H₂S.