PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING

Research output: Patent

Cite this

@misc{3a0a303722e242dab3178ef95f29eeb6,

title = "PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING",

author = "Chad Mirkin and Dravid, {Vinayak P}",

note = "filingdate: 2002-12-17 issueddate: 2007-9-25 Status: published attorneydocketnumber: 2002-008-10; 7273636",

year = "2007",

month = sep,

day = "25",

language = "Undefined/Unknown",

type = "Patent",

}