Performance characteristics of a pressure microsensor

Kenton R. Kaufman*, Tom Wavering, Duane Morrow, Jennifer Davis, Richard L. Lieber

*Corresponding author for this work

Research output: Contribution to journalArticle

38 Scopus citations

Abstract

A new fiber optic microsensor has been developed for pressure measurement. The pressure microsensor is extremely small (360μm). Performance characteristics of the microsensor were evaluated over a pressure range from 0 to 250mmHg. Five sensors were compared to a National Institute of Standards and Technology traceable reference pressure. The microsensor had an accuracy, repeatability, and linearity better than 2% full-scale output (FSO) and a hysteresis of 4.5% FSO.

Original languageEnglish (US)
Pages (from-to)283-287
Number of pages5
JournalJournal of Biomechanics
Volume36
Issue number2
DOIs
StatePublished - Feb 1 2003

Keywords

  • Extrinsic Fabry-Perot interferometer
  • Fiber optic sensor
  • Pressure

ASJC Scopus subject areas

  • Biophysics
  • Orthopedics and Sports Medicine
  • Biomedical Engineering
  • Rehabilitation

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