Periodic surface pattern fabrication via biprism interference micromachining

Ishan Saxena, Jintao Liu, Kornel Ehmann, Jian Cao

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


A novel surface micro-texturing process is proposed that is capable of generating extremely scalable periodic patterns on a workpiece surface. The process, henceforth named as 'biprism interference micro-machining' utilizes a two-beam interference pattern generated by a Fresnel biprism placed coaxially in the path of a laser pulse to fabricate periodic micro-channels on aluminum surfaces. The channels were fabricated over an area of approximately 8 mm × 6 mm and with a periodicity of 9 and 21 μm, by using custom-built two-faceted biprisms with side angles of 4° and 1.5°, respectively. A beam propagation simulation was carried out to predict the intensity distribution and contrast of the intensity pattern of laser pulse at the workpiece surface. The entire process takes 1-8 laser pulses, thereby demonstrating ultra-fast speed and scalability. Also, the efficiency, precision and resolution of the process are higher than that of conventional mask-based and interference-based micromachining.

Original languageEnglish (US)
Article number045006
JournalSurface Topography: Metrology and Properties
Issue number4
StatePublished - Dec 2015


  • Laser micro-machining
  • Micro-texturing
  • Surface pattern

ASJC Scopus subject areas

  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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