Phase stability of epitaxial KTaxNb1-xO3 thin films deposited by metalorganic chemical vapor deposition

B. M. Nichols*, B. H. Hoerman, J. H. Hwang, T. O. Mason, B. W. Wessels

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

The phase stability of epitaxial KTaxNb1-xO3 (0 ≤ x ≤ 1) thin films, with compositions over the entire solid solution range, was investigated. KTaxNb1-xO3 thin films were deposited on (100) MgAl2O4 substrates by metalorganic chemical vapor deposition. Films with compositions x ≤ 0.30 were orthorhombic, as determined by x-ray diffraction. Dielectric measurements at room temperature indicated the presence of morphotropic phase boundaries at x = 0.30 and at x = 0.74. Temperature-dependent measurements of the dielectric constant for KNbO3 from 80 to 800 K indicated three structural phase transitions at 710, 520, and 240 K. For intermediate compositions, a decrease in the Curie and tetragonal-orthorhombic transition temperatures was observed with increasing Ta atomic percent, similar to the bulk phase equilibrium. In contrast to bulk materials, an increase in the orthorhombic-rhombohedral transition temperature with increasing x was observed for the films, resulting in the stabilization of a rhombohedral phase at room temperature for compositions 0.45 ≤ x ≤0.73. Differences between the phase stability for the thin films and bulk were attributed to lattice misfit strain.

Original languageEnglish (US)
Pages (from-to)106-110
Number of pages5
JournalJournal of Materials Research
Volume18
Issue number1
DOIs
StatePublished - Jan 2003

Funding

The authors would like to thank Prof. T.J. Marks and Dr. J. Belot (Northwestern University) for supplying the metalorganic precursors and Joel Gregie (Northwestern) for assistance with low-temperature dielectric measurements. One author (B.M.N.) would like to thank the National Science Foundation Minority Graduate Fellowship and Lucent Technologies Cooperative Research Fellowship Program (CRFP) for support. This work was supported under AFOSR/ARPA Award No. F49620-96-1-0262 and NSF/MRSEC Award No. DMR-9632472. J.H. and T.O.M. also acknowledge the support of the United States Department of Energy under Grant No. FG02-84-45097.

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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