Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films

Feifei Zhang; Sridhar Krishnaswamy; Carmen M. Lilley

doi:10.1063/1.2184647

Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films

Feifei Zhang^*, Sridhar Krishnaswamy, Carmen M. Lilley

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

In this paper, we compare two photoacoustic techniques to characterize the mechanical parameters of edge-supported aluminum and silicon nitride double-layer thin films. In a first set of experiments, a femtosecond transient pump-probe technique is used to investigate the Young's moduli of the aluminum and silicon nitride layers by launching ultra-high frequency bulk acoustic waves in the films. In a second set of experiments, dispersion curves of the A ₀ mode of the Lamb waves that propagate along the unsupported films are measured using a broadband photoacoustic guided-wave method. The residual stresses and flexural rigidities for the same set of double-layer membranes are determined from these dispersion curves. Comparisons of the results obtained by the two photoacoustic techniques are made.

Original language	English (US)
Title of host publication	Review of Progress in Quantitative Nondestructive Evaluation
Subtitle of host publication	Volume 25B
Pages	1098-1104
Number of pages	7
DOIs	https://doi.org/10.1063/1.2184647
State	Published - Mar 6 2006
Event	Review of Progress in Quantitative Nondestructive - Brunswick, ME, United States Duration: Jul 31 2005 → Aug 5 2005

Publication series

Name	AIP Conference Proceedings
Volume	820 II
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	Review of Progress in Quantitative Nondestructive
Country/Territory	United States
City	Brunswick, ME
Period	7/31/05 → 8/5/05

Keywords

Guided-wave photoacoustics
Mechanical properties
Picosecond ultrasonics
Thin films

ASJC Scopus subject areas

Ecology, Evolution, Behavior and Systematics
Ecology
Plant Science
General Physics and Astronomy
Nature and Landscape Conservation

Access to Document

10.1063/1.2184647

Cite this

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title = "Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films",

abstract = "In this paper, we compare two photoacoustic techniques to characterize the mechanical parameters of edge-supported aluminum and silicon nitride double-layer thin films. In a first set of experiments, a femtosecond transient pump-probe technique is used to investigate the Young's moduli of the aluminum and silicon nitride layers by launching ultra-high frequency bulk acoustic waves in the films. In a second set of experiments, dispersion curves of the A 0 mode of the Lamb waves that propagate along the unsupported films are measured using a broadband photoacoustic guided-wave method. The residual stresses and flexural rigidities for the same set of double-layer membranes are determined from these dispersion curves. Comparisons of the results obtained by the two photoacoustic techniques are made.",

keywords = "Guided-wave photoacoustics, Mechanical properties, Picosecond ultrasonics, Thin films",

author = "Feifei Zhang and Sridhar Krishnaswamy and Lilley, {Carmen M.}",

year = "2006",

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doi = "10.1063/1.2184647",

language = "English (US)",

isbn = "0735403120",

series = "AIP Conference Proceedings",

pages = "1098--1104",

booktitle = "Review of Progress in Quantitative Nondestructive Evaluation",

note = "Review of Progress in Quantitative Nondestructive ; Conference date: 31-07-2005 Through 05-08-2005",

}

Zhang, F, Krishnaswamy, S & Lilley, CM 2006, Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films. in Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. AIP Conference Proceedings, vol. 820 II, pp. 1098-1104, Review of Progress in Quantitative Nondestructive, Brunswick, ME, United States, 7/31/05. https://doi.org/10.1063/1.2184647

Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films. / Zhang, Feifei; Krishnaswamy, Sridhar; Lilley, Carmen M.
Review of Progress in Quantitative Nondestructive Evaluation: Volume 25B. 2006. p. 1098-1104 (AIP Conference Proceedings; Vol. 820 II).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films

AU - Zhang, Feifei

AU - Krishnaswamy, Sridhar

AU - Lilley, Carmen M.

PY - 2006/3/6

Y1 - 2006/3/6

N2 - In this paper, we compare two photoacoustic techniques to characterize the mechanical parameters of edge-supported aluminum and silicon nitride double-layer thin films. In a first set of experiments, a femtosecond transient pump-probe technique is used to investigate the Young's moduli of the aluminum and silicon nitride layers by launching ultra-high frequency bulk acoustic waves in the films. In a second set of experiments, dispersion curves of the A 0 mode of the Lamb waves that propagate along the unsupported films are measured using a broadband photoacoustic guided-wave method. The residual stresses and flexural rigidities for the same set of double-layer membranes are determined from these dispersion curves. Comparisons of the results obtained by the two photoacoustic techniques are made.

AB - In this paper, we compare two photoacoustic techniques to characterize the mechanical parameters of edge-supported aluminum and silicon nitride double-layer thin films. In a first set of experiments, a femtosecond transient pump-probe technique is used to investigate the Young's moduli of the aluminum and silicon nitride layers by launching ultra-high frequency bulk acoustic waves in the films. In a second set of experiments, dispersion curves of the A 0 mode of the Lamb waves that propagate along the unsupported films are measured using a broadband photoacoustic guided-wave method. The residual stresses and flexural rigidities for the same set of double-layer membranes are determined from these dispersion curves. Comparisons of the results obtained by the two photoacoustic techniques are made.

KW - Guided-wave photoacoustics

KW - Mechanical properties

KW - Picosecond ultrasonics

KW - Thin films

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Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films

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Keywords

ASJC Scopus subject areas

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