Photoacoustic evaluation of the mechanical properties of aluminum / silicon nitride double-layer thin films

Feifei Zhang*, Sridhar Krishnaswamy, Carmen M. Lilley

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we compare two photoacoustic techniques to characterize the mechanical parameters of edge-supported aluminum and silicon nitride double-layer thin films. In a first set of experiments, a femtosecond transient pump-probe technique is used to investigate the Young's moduli of the aluminum and silicon nitride layers by launching ultra-high frequency bulk acoustic waves in the films. In a second set of experiments, dispersion curves of the A 0 mode of the Lamb waves that propagate along the unsupported films are measured using a broadband photoacoustic guided-wave method. The residual stresses and flexural rigidities for the same set of double-layer membranes are determined from these dispersion curves. Comparisons of the results obtained by the two photoacoustic techniques are made.

Original languageEnglish (US)
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Subtitle of host publicationVolume 25B
Pages1098-1104
Number of pages7
DOIs
StatePublished - Mar 6 2006
EventReview of Progress in Quantitative Nondestructive - Brunswick, ME, United States
Duration: Jul 31 2005Aug 5 2005

Publication series

NameAIP Conference Proceedings
Volume820 II
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherReview of Progress in Quantitative Nondestructive
CountryUnited States
CityBrunswick, ME
Period7/31/058/5/05

Keywords

  • Guided-wave photoacoustics
  • Mechanical properties
  • Picosecond ultrasonics
  • Thin films

ASJC Scopus subject areas

  • Ecology, Evolution, Behavior and Systematics
  • Ecology
  • Plant Science
  • Physics and Astronomy(all)
  • Nature and Landscape Conservation

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