Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: The effect of hydrogen dilution

Y. Y. Kim; H. A. Alwi; R. Awang; S. Krishnaswamy

doi:10.1088/1742-6596/278/1/012006

Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: The effect of hydrogen dilution

Y. Y. Kim, H. A. Alwi, R. Awang, S. Krishnaswamy

Mechanical Engineering

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Abstract

Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H₂) diluents to methane (CH₄) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H₂ dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20%) compared to the results of previous studies.

Original language	English (US)
Article number	012006
Journal	Journal of Physics: Conference Series
Volume	278
Issue number	1
DOIs	https://doi.org/10.1088/1742-6596/278/1/012006
State	Published - 2011

ASJC Scopus subject areas

General Physics and Astronomy

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10.1088/1742-6596/278/1/012006

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title = "Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: The effect of hydrogen dilution",

abstract = "Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H2) diluents to methane (CH4) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H2 dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20%) compared to the results of previous studies.",

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AU - Krishnaswamy, S.

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AB - Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H2) diluents to methane (CH4) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H2 dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20%) compared to the results of previous studies.

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Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: The effect of hydrogen dilution

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