Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H2) diluents to methane (CH4) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H2 dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20%) compared to the results of previous studies.
ASJC Scopus subject areas
- Physics and Astronomy(all)