Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates

Sang Min Won*, Hoon Sik Kim, Nanshu Lu, Dae Gon Kim, Cesar Del Solar, Terrisa Duenas, Abid Ameen, John A. Rogers

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

52 Scopus citations

Abstract

This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.

Original languageEnglish (US)
Article number6012520
Pages (from-to)4074-4078
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume58
Issue number11
DOIs
StatePublished - Nov 1 2011

Keywords

  • Flexible circuits
  • single-crystalline silicon sensor
  • strain gauge

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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