Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates

Sang Min Won; Hoon Sik Kim; Nanshu Lu; Dae Gon Kim; Cesar Del Solar; Terrisa Duenas; Abid Ameen; John A. Rogers

doi:10.1109/TED.2011.2164923

Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates

Sang Min Won^*, Hoon Sik Kim, Nanshu Lu, Dae Gon Kim, Cesar Del Solar, Terrisa Duenas, Abid Ameen, John A. Rogers

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Abstract

This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.

Original language	English (US)
Article number	6012520
Pages (from-to)	4074-4078
Number of pages	5
Journal	IEEE Transactions on Electron Devices
Volume	58
Issue number	11
DOIs	https://doi.org/10.1109/TED.2011.2164923
State	Published - Nov 2011

Keywords

Flexible circuits
single-crystalline silicon sensor
strain gauge

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TED.2011.2164923

Cite this

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title = "Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates",

abstract = "This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.",

keywords = "Flexible circuits, single-crystalline silicon sensor, strain gauge",

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note = "Funding Information: Manuscript received April 9, 2011; revised July 16, 2011; accepted August 6, 2011. Date of publication September 8, 2011; date of current version October 21, 2011. This work was supported by the Air Force Research Laboratory. The review of this paper was arranged by Editor A. M. Ionescu.",

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AU - Kim, Hoon Sik

AU - Lu, Nanshu

AU - Kim, Dae Gon

AU - Del Solar, Cesar

AU - Duenas, Terrisa

AU - Ameen, Abid

AU - Rogers, John A.

N1 - Funding Information: Manuscript received April 9, 2011; revised July 16, 2011; accepted August 6, 2011. Date of publication September 8, 2011; date of current version October 21, 2011. This work was supported by the Air Force Research Laboratory. The review of this paper was arranged by Editor A. M. Ionescu.

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N2 - This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.

AB - This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.

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Piezoresistive strain sensors and multiplexed arrays using assemblies of single-crystalline silicon nanoribbons on plastic substrates

Abstract

Keywords

ASJC Scopus subject areas

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