@article{4896bdf7bb954237a1b24c651050e37e,
title = "Plasma-assisted MOCVD growth of superconducting NbN thin films using Nb dialkylamide and Nb alkylimide precursors",
author = "Xiang Liu and Babcock, {Jason R.} and Lane, {Melissa A.} and Belot, {John A.} and Ott, {Andrew W.} and Metz, {Matthew V.} and Kannewurf, {Carl R.} and Chang, {Robert P.H.} and Marks, {Tobin J.}",
year = "2001",
month = jan,
day = "1",
doi = "10.1002/1521-3862(200101)7:1<25::AID-CVDE25>3.0.CO;2-O",
language = "English (US)",
volume = "7",
pages = "25--28",
journal = "Chemical Vapor Deposition",
issn = "0948-1907",
publisher = "Wiley-VCH Verlag",
number = "1",
}