Plow and ridge nanofabrication

Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Abrin L. Schmucker, Chad A. Mirkin*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

Original languageEnglish (US)
Pages (from-to)3058-3062
Number of pages5
JournalSmall
Volume9
Issue number18
DOIs
StatePublished - Sep 23 2013

Keywords

  • atomic force microscopy
  • nanofabrication
  • nanolithography
  • polymers
  • scanning probe microscopy

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)

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