Plow and ridge nanofabrication

Wooyoung Shim; Keith A. Brown; Xiaozhu Zhou; Boris Rasin; Xing Liao; Abrin L. Schmucker; Chad A. Mirkin

doi:10.1002/smll.201203014

Plow and ridge nanofabrication

Wooyoung Shim, Keith A. Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Abrin L. Schmucker, Chad A. Mirkin^*

^*Corresponding author for this work

Chemistry

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

Original language	English (US)
Pages (from-to)	3058-3062
Number of pages	5
Journal	Small
Volume	9
Issue number	18
DOIs	https://doi.org/10.1002/smll.201203014
State	Published - Sep 23 2013

Keywords

atomic force microscopy
nanofabrication
nanolithography
polymers
scanning probe microscopy

ASJC Scopus subject areas

General Chemistry
Engineering (miscellaneous)
Biotechnology
General Materials Science
Biomaterials

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1002/smll.201203014

Cite this

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title = "Plow and ridge nanofabrication",

abstract = "Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.",

keywords = "atomic force microscopy, nanofabrication, nanolithography, polymers, scanning probe microscopy",

author = "Wooyoung Shim and Brown, {Keith A.} and Xiaozhu Zhou and Boris Rasin and Xing Liao and Schmucker, {Abrin L.} and Mirkin, {Chad A.}",

year = "2013",

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day = "23",

doi = "10.1002/smll.201203014",

language = "English (US)",

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T1 - Plow and ridge nanofabrication

AU - Shim, Wooyoung

AU - Brown, Keith A.

AU - Zhou, Xiaozhu

AU - Rasin, Boris

AU - Liao, Xing

AU - Schmucker, Abrin L.

AU - Mirkin, Chad A.

PY - 2013/9/23

Y1 - 2013/9/23

N2 - Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

AB - Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

KW - atomic force microscopy

KW - nanofabrication

KW - nanolithography

KW - polymers

KW - scanning probe microscopy

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UR - http://www.scopus.com/inward/citedby.url?scp=84884265675&partnerID=8YFLogxK

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SP - 3058

EP - 3062

JO - Small

JF - Small

IS - 18

ER -

Plow and ridge nanofabrication

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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