Polydentate amines as CVD precursor ancillary ligands. Epitaxial MgO thin-film growth using a highly volatile, thermally and air-stable magnesium precursor

Jason R. Babcock, Douglas D. Benson, Anchuan Wang, Nikki L. Edleman, John A. Belot, Matthew V. Metz, Tobin Jay Marks*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Scopus citations
Original languageEnglish (US)
Pages (from-to)180-183
Number of pages4
JournalChemical Vapor Deposition
Issue number4
StatePublished - Jan 1 2000

ASJC Scopus subject areas

  • General Chemistry
  • Surfaces and Interfaces
  • Process Chemistry and Technology

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