Polymer imprint lithography with molecular-scale resolution

Feng Hua, Yugang Sun, Anshu Gaur, Matthew A. Meitl, Lise Bilhaut, Lolita Rotkina, Jingfeng Wang, Phil Geil, Moonsub Shim, John A. Rogers*, Anne Shim

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

342 Scopus citations


We show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography with feature sizes as small as 2 nm - comparable to the size of an individual molecule. The angstrom level uniformity in the critical dimensions of the features provided by this unusual type of template provides a unique ability to investigate systematically the resolution of imprint lithography at this molecular scale. Collective results of experiments with several polymer formulations for the molds and the molded materials suggest that the density of cross-links is an important molecular parameter that influences the ultimate resolution in this process. Optimized materials enable reliable, repetitive patterning in this single nanometer range.

Original languageEnglish (US)
Pages (from-to)2467-2471
Number of pages5
JournalNano letters
Issue number12
StatePublished - Dec 1 2004

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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