Polymer micro- and nano-scale fabrication technology development for bioinspired sensing

Chang Liu*, Jonathan Engel, Jack Chen, Nannan Chen, Saunvit Pandya, Yingchen Yang, Craig Tucker, Sheryl Coombs, Joseph Humphrey, Horst Bleckmann

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (Force Sensitive Resistor) Polymer, MWCNT, and Polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed to mimic the ability of natural haircells to sense flow, vibration, and touch. However, in order to improve the sensitivity and robustness, the use of polymers is necessary. In this paper, we present the different generations of bioinspired artificial haircell sensors, along with the polymers and processes needed for their construction.

Original languageEnglish (US)
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages1470-1473
Number of pages4
DOIs
StatePublished - Dec 1 2006
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: Jan 18 2006Jan 21 2006

Publication series

NameProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Other

Other1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
CountryChina
CityZhuhai
Period1/18/061/21/06

Keywords

  • Artificial haircell sensor
  • Flow sensors
  • Polymer MEMS
  • Polymers
  • Sensors

ASJC Scopus subject areas

  • Biotechnology
  • Materials Science (miscellaneous)

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