TY - GEN
T1 - Polymer micro- and nano-scale fabrication technology development for bioinspired sensing
AU - Liu, Chang
AU - Engel, Jonathan
AU - Chen, Jack
AU - Chen, Nannan
AU - Pandya, Saunvit
AU - Yang, Yingchen
AU - Tucker, Craig
AU - Coombs, Sheryl
AU - Humphrey, Joseph
AU - Bleckmann, Horst
PY - 2006/12/1
Y1 - 2006/12/1
N2 - We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (Force Sensitive Resistor) Polymer, MWCNT, and Polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed to mimic the ability of natural haircells to sense flow, vibration, and touch. However, in order to improve the sensitivity and robustness, the use of polymers is necessary. In this paper, we present the different generations of bioinspired artificial haircell sensors, along with the polymers and processes needed for their construction.
AB - We report on the development of new elastomers and processes that utilize polymers such as PDMS, FSR (Force Sensitive Resistor) Polymer, MWCNT, and Polyurethane to realize bioinspired sensors such as artificial haircells. In nature, haircell sensors are used by fish to sense flow, by spiders to sense vibration, and by some vertebrates for hearing and acoustics. An artificial haircell sensor is designed to mimic the ability of natural haircells to sense flow, vibration, and touch. However, in order to improve the sensitivity and robustness, the use of polymers is necessary. In this paper, we present the different generations of bioinspired artificial haircell sensors, along with the polymers and processes needed for their construction.
KW - Artificial haircell sensor
KW - Flow sensors
KW - Polymer MEMS
KW - Polymers
KW - Sensors
UR - http://www.scopus.com/inward/record.url?scp=46149096714&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=46149096714&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2006.334809
DO - 10.1109/NEMS.2006.334809
M3 - Conference contribution
AN - SCOPUS:46149096714
SN - 1424401402
SN - 9781424401406
T3 - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
SP - 1470
EP - 1473
BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
T2 - 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Y2 - 18 January 2006 through 21 January 2006
ER -