Polymer micromachined multimodal tactile sensors

Jonathan Engel; Jack Chen; Zhifang Fan; Chang Liu

doi:10.1016/j.sna.2004.05.037

Polymer micromachined multimodal tactile sensors

Jonathan Engel^*, Jack Chen, Zhifang Fan, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

203 Scopus citations

Abstract

We present the design, fabrication process, and characterization of a multimodal tactile sensor made of polymer materials and metal thin film sensors. The multimodal sensor can detect the hardness, thermal conductivity, temperature, and surface contour of a contact object for comprehensive evaluation of contact objects and events. Polymer materials reduce the cost and the fabrication complexity for the sensor skin, while increasing mechanical flexibility and robustness. Experimental tests show the skin is able to differentiate between objects using measured properties.

Original language	English (US)
Pages (from-to)	50-61
Number of pages	12
Journal	Sensors and Actuators, A: Physical
Volume	117
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2004.05.037
State	Published - Jan 3 2005

Keywords

Hardness
Polyimide
Sensor skin
Tactile
Thermal conductivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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title = "Polymer micromachined multimodal tactile sensors",

abstract = "We present the design, fabrication process, and characterization of a multimodal tactile sensor made of polymer materials and metal thin film sensors. The multimodal sensor can detect the hardness, thermal conductivity, temperature, and surface contour of a contact object for comprehensive evaluation of contact objects and events. Polymer materials reduce the cost and the fabrication complexity for the sensor skin, while increasing mechanical flexibility and robustness. Experimental tests show the skin is able to differentiate between objects using measured properties.",

keywords = "Hardness, Polyimide, Sensor skin, Tactile, Thermal conductivity",

author = "Jonathan Engel and Jack Chen and Zhifang Fan and Chang Liu",

note = "Funding Information: This material is based upon work supported by the National Science Foundation under Grant No. NSF IIS 00-80639. ",

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AU - Engel, Jonathan

AU - Chen, Jack

AU - Fan, Zhifang

AU - Liu, Chang

N1 - Funding Information: This material is based upon work supported by the National Science Foundation under Grant No. NSF IIS 00-80639.

PY - 2005/1/3

Y1 - 2005/1/3

N2 - We present the design, fabrication process, and characterization of a multimodal tactile sensor made of polymer materials and metal thin film sensors. The multimodal sensor can detect the hardness, thermal conductivity, temperature, and surface contour of a contact object for comprehensive evaluation of contact objects and events. Polymer materials reduce the cost and the fabrication complexity for the sensor skin, while increasing mechanical flexibility and robustness. Experimental tests show the skin is able to differentiate between objects using measured properties.

AB - We present the design, fabrication process, and characterization of a multimodal tactile sensor made of polymer materials and metal thin film sensors. The multimodal sensor can detect the hardness, thermal conductivity, temperature, and surface contour of a contact object for comprehensive evaluation of contact objects and events. Polymer materials reduce the cost and the fabrication complexity for the sensor skin, while increasing mechanical flexibility and robustness. Experimental tests show the skin is able to differentiate between objects using measured properties.

KW - Hardness

KW - Polyimide

KW - Sensor skin

KW - Tactile

KW - Thermal conductivity

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JO - Sensors and Actuators A: Physical

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Polymer micromachined multimodal tactile sensors

Abstract

Keywords

ASJC Scopus subject areas

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