Polymer micromachined multimodal tactile sensors

Jonathan Engel*, Jack Chen, Zhifang Fan, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

189 Scopus citations

Abstract

We present the design, fabrication process, and characterization of a multimodal tactile sensor made of polymer materials and metal thin film sensors. The multimodal sensor can detect the hardness, thermal conductivity, temperature, and surface contour of a contact object for comprehensive evaluation of contact objects and events. Polymer materials reduce the cost and the fabrication complexity for the sensor skin, while increasing mechanical flexibility and robustness. Experimental tests show the skin is able to differentiate between objects using measured properties.

Original languageEnglish (US)
Pages (from-to)50-61
Number of pages12
JournalSensors and Actuators, A: Physical
Volume117
Issue number1
DOIs
StatePublished - Jan 3 2005

Keywords

  • Hardness
  • Polyimide
  • Sensor skin
  • Tactile
  • Thermal conductivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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