Polymer pen lithography

Fengwei Huo; Zijian Zheng; Gengfeng Zheng; Louise R. Giam; Hua Zhang; Chad A. Mirkin

doi:10.1126/science.1162193

Polymer pen lithography

Fengwei Huo, Zijian Zheng, Gengfeng Zheng, Louise R. Giam, Hua Zhang, Chad A. Mirkin

Chemistry

Research output: Contribution to journal › Article › peer-review

444 Scopus citations

Abstract

We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

Original language	English (US)
Pages (from-to)	1658-1660
Number of pages	3
Journal	Science
Volume	321
Issue number	5896
DOIs	https://doi.org/10.1126/science.1162193
State	Published - Sep 19 2008

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abstract = "We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a {"}direct write{"} manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.",

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T1 - Polymer pen lithography

AU - Huo, Fengwei

AU - Zheng, Zijian

AU - Zheng, Gengfeng

AU - Giam, Louise R.

AU - Zhang, Hua

AU - Mirkin, Chad A.

PY - 2008/9/19

Y1 - 2008/9/19

N2 - We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

AB - We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

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Polymer pen lithography

Abstract

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