Polymer pen lithography

Fengwei Huo, Zijian Zheng, Gengfeng Zheng, Louise R. Giam, Hua Zhang, Chad A. Mirkin

Research output: Contribution to journalArticlepeer-review

383 Scopus citations

Abstract

We report a low-cost, high-throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip-pen nanolithography with the large-area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid-shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

Original languageEnglish (US)
Pages (from-to)1658-1660
Number of pages3
JournalScience
Volume321
Issue number5896
DOIs
StatePublished - Sep 19 2008

ASJC Scopus subject areas

  • General

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