Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor

J. M. Engel; J. Chen; D. Bullen; C. Liu

Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor

J. M. Engel^*, J. Chen, D. Bullen, C. Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

43 Scopus citations

Abstract

Characterization and utilization of a two-part room temperature curing polyurethane elastomer as a MEMS material is presented. Chemical resistance, thermal degradation, elastic modulus, and adhesion are tested and compared to the performance of polydimethylsiloxane (PDMS). Polyurethane elastomer is found to exhibit excellent elastic and adhesion performance, with reduced solvent resistance when compared to PDMS. A two-axis artificial hair cell (AHC) is fabricated with carbon impregnated polyurethane force sensitive resistors (FSRs) at the base of a vertical polyurethane cantilever hair. The FSRs transduce the motion of the cilium into a change in resistance via a half-bridge. Device sensitivity is found to be 245 ppm resistance change per micron (ppm/μm) of tip deflection.

Original language	English (US)
Article number	TPa9
Pages (from-to)	279-282
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
State	Published - Oct 25 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: Jan 30 2005 → Feb 3 2005

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor",

abstract = "Characterization and utilization of a two-part room temperature curing polyurethane elastomer as a MEMS material is presented. Chemical resistance, thermal degradation, elastic modulus, and adhesion are tested and compared to the performance of polydimethylsiloxane (PDMS). Polyurethane elastomer is found to exhibit excellent elastic and adhesion performance, with reduced solvent resistance when compared to PDMS. A two-axis artificial hair cell (AHC) is fabricated with carbon impregnated polyurethane force sensitive resistors (FSRs) at the base of a vertical polyurethane cantilever hair. The FSRs transduce the motion of the cilium into a change in resistance via a half-bridge. Device sensitivity is found to be 245 ppm resistance change per micron (ppm/μm) of tip deflection.",

author = "Engel, {J. M.} and J. Chen and D. Bullen and C. Liu",

year = "2005",

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language = "English (US)",

pages = "279--282",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

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Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor. / Engel, J. M.; Chen, J.; Bullen, D. et al.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 25.10.2005, p. 279-282.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Polyurethane rubber as a MEMS material

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

AU - Engel, J. M.

AU - Chen, J.

AU - Bullen, D.

AU - Liu, C.

PY - 2005/10/25

Y1 - 2005/10/25

N2 - Characterization and utilization of a two-part room temperature curing polyurethane elastomer as a MEMS material is presented. Chemical resistance, thermal degradation, elastic modulus, and adhesion are tested and compared to the performance of polydimethylsiloxane (PDMS). Polyurethane elastomer is found to exhibit excellent elastic and adhesion performance, with reduced solvent resistance when compared to PDMS. A two-axis artificial hair cell (AHC) is fabricated with carbon impregnated polyurethane force sensitive resistors (FSRs) at the base of a vertical polyurethane cantilever hair. The FSRs transduce the motion of the cilium into a change in resistance via a half-bridge. Device sensitivity is found to be 245 ppm resistance change per micron (ppm/μm) of tip deflection.

AB - Characterization and utilization of a two-part room temperature curing polyurethane elastomer as a MEMS material is presented. Chemical resistance, thermal degradation, elastic modulus, and adhesion are tested and compared to the performance of polydimethylsiloxane (PDMS). Polyurethane elastomer is found to exhibit excellent elastic and adhesion performance, with reduced solvent resistance when compared to PDMS. A two-axis artificial hair cell (AHC) is fabricated with carbon impregnated polyurethane force sensitive resistors (FSRs) at the base of a vertical polyurethane cantilever hair. The FSRs transduce the motion of the cilium into a change in resistance via a half-bridge. Device sensitivity is found to be 245 ppm resistance change per micron (ppm/μm) of tip deflection.

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M3 - Conference article

AN - SCOPUS:26844537016

SN - 1084-6999

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - TPa9

Y2 - 30 January 2005 through 3 February 2005

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Polyurethane rubber as a MEMS material: Characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor

Abstract

ASJC Scopus subject areas

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