Porous waveguide facilitated low divergence quantum cascade laser

Wen Yin, Quanyong Lu, Wanfeng Liu, Jinchuan Zhang, Lijun Wang, Junqi Liu, Lu Li, Fengqi Liu*, Zhanguo Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.

Original languageEnglish (US)
Article number064008
JournalJournal of Semiconductors
Volume32
Issue number6
DOIs
StatePublished - Jun 2011

Keywords

  • Quantum cascade laser
  • electrochemical etching
  • porous structure
  • ridge waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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