Abstract
A quantum cascade laser with a porous waveguide structure emitting at 4.5 μm is reported. A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process. In contrast to the common ridge waveguide laser, devices with a porous structure give rather better beam quality. Utilizing this porous structure as a high-order mode absorber, the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.
Original language | English (US) |
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Article number | 064008 |
Journal | Journal of Semiconductors |
Volume | 32 |
Issue number | 6 |
DOIs | |
State | Published - Jun 2011 |
Keywords
- Quantum cascade laser
- electrochemical etching
- porous structure
- ridge waveguide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry