Possibilities for projection x-ray lithography using holographic optical elements

Malcolm R. Howells, Chris Jacobsen

Research output: Contribution to journalArticlepeer-review

7 Scopus citations
Original languageEnglish (US)
Pages (from-to)1580-1582
Number of pages3
JournalApplied optics
Issue number13
StatePublished - May 1991

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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