Predictions of strength in MEMS components with defects - A novel experimental-theoretical approach

N. Pugno; B. Peng; H. D. Espinosa

doi:10.1016/j.ijsolstr.2004.06.026

Predictions of strength in MEMS components with defects - A novel experimental-theoretical approach

N. Pugno, B. Peng, H. D. Espinosa^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

59 Scopus citations

Abstract

This paper presents a novel experimental-theoretical method to investigate the strength of structures having complex geometries, which are commonly used in microelectromechanical systems (MEMS). It involves the stretching to failure of freestanding thin-film membranes, in a fixed-fixed configuration, containing micro-fabricated sharp cracks, blunt notches and re-entrant corners. The defects, made by nanoindentation and focused ion beam milling, are characterized by scanning electron microscopy (SEM). MEMS structures made of ultra-nano-crystalline-diamond (UNCD), a material developed at Argonne National Laboratory, were investigated using this methodology. A theory to predict the strength of microstructures with defects is proposed and compared with experimental results. It is shown that fracture mechanics general concepts can be applied with confidence in the design of MEMS. An experimental methodology and formulas to predict strength of MEMS structures possessing defects of various geometries are provided.

Original language	English (US)
Pages (from-to)	647-661
Number of pages	15
Journal	International Journal of Solids and Structures
Volume	42
Issue number	2
DOIs	https://doi.org/10.1016/j.ijsolstr.2004.06.026
State	Published - Jan 2005

Funding

This work was sponsored by the National Science Foundation under GOALI Award no. CMS-0120866/001. Work was also supported in part by the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award Number EEC-0118025 and by DOE Office of Science under contract no. N00014-97-1-0550. We thank Argonne National Laboratory for their support during the material processing. The authors would like to acknowledge N. Moldovan for assistance in the micro-fabrication of the specimens and many insightful suggestions.

Keywords

Brittle materials
Fracture
MEMS
Strength
Thin films

ASJC Scopus subject areas

Modeling and Simulation
General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Applied Mathematics

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10.1016/j.ijsolstr.2004.06.026

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title = "Predictions of strength in MEMS components with defects - A novel experimental-theoretical approach",

abstract = "This paper presents a novel experimental-theoretical method to investigate the strength of structures having complex geometries, which are commonly used in microelectromechanical systems (MEMS). It involves the stretching to failure of freestanding thin-film membranes, in a fixed-fixed configuration, containing micro-fabricated sharp cracks, blunt notches and re-entrant corners. The defects, made by nanoindentation and focused ion beam milling, are characterized by scanning electron microscopy (SEM). MEMS structures made of ultra-nano-crystalline-diamond (UNCD), a material developed at Argonne National Laboratory, were investigated using this methodology. A theory to predict the strength of microstructures with defects is proposed and compared with experimental results. It is shown that fracture mechanics general concepts can be applied with confidence in the design of MEMS. An experimental methodology and formulas to predict strength of MEMS structures possessing defects of various geometries are provided.",

keywords = "Brittle materials, Fracture, MEMS, Strength, Thin films",

author = "N. Pugno and B. Peng and Espinosa, {H. D.}",

note = "Funding Information: The following grant information was disclosed by the authors: Science and Technology Projects in Zhejiang Province of China: LY17C170005, 2016C02054. Funding Information: This work was supported by grants from the Science and Technology Projects in Zhejiang Province of China (grant numbers 2021C02007, LY17C170005, 2016C02054). The funders had no role in study design, data collection and analysis, decision to publish, or preparation of the manuscript.",

year = "2005",

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doi = "10.1016/j.ijsolstr.2004.06.026",

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N2 - This paper presents a novel experimental-theoretical method to investigate the strength of structures having complex geometries, which are commonly used in microelectromechanical systems (MEMS). It involves the stretching to failure of freestanding thin-film membranes, in a fixed-fixed configuration, containing micro-fabricated sharp cracks, blunt notches and re-entrant corners. The defects, made by nanoindentation and focused ion beam milling, are characterized by scanning electron microscopy (SEM). MEMS structures made of ultra-nano-crystalline-diamond (UNCD), a material developed at Argonne National Laboratory, were investigated using this methodology. A theory to predict the strength of microstructures with defects is proposed and compared with experimental results. It is shown that fracture mechanics general concepts can be applied with confidence in the design of MEMS. An experimental methodology and formulas to predict strength of MEMS structures possessing defects of various geometries are provided.

AB - This paper presents a novel experimental-theoretical method to investigate the strength of structures having complex geometries, which are commonly used in microelectromechanical systems (MEMS). It involves the stretching to failure of freestanding thin-film membranes, in a fixed-fixed configuration, containing micro-fabricated sharp cracks, blunt notches and re-entrant corners. The defects, made by nanoindentation and focused ion beam milling, are characterized by scanning electron microscopy (SEM). MEMS structures made of ultra-nano-crystalline-diamond (UNCD), a material developed at Argonne National Laboratory, were investigated using this methodology. A theory to predict the strength of microstructures with defects is proposed and compared with experimental results. It is shown that fracture mechanics general concepts can be applied with confidence in the design of MEMS. An experimental methodology and formulas to predict strength of MEMS structures possessing defects of various geometries are provided.

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Predictions of strength in MEMS components with defects - A novel experimental-theoretical approach

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