Keyphrases
System Components
100%
Micro-electro-mechanical Systems
100%
Strength Prediction
100%
System Structure
40%
Scanning Electron Microscopy
20%
Focused Ion Beam Milling
20%
Argonne National Laboratory
20%
Complex Geometry
20%
Microstructure
20%
Fracture Mechanics
20%
Free-standing Film
20%
Experimental Methodology
20%
Thin Membrane
20%
Nanoindentation
20%
Structural Strength
20%
Fixed-fixed
20%
Micro-fabricated
20%
Blunt Notch
20%
Sharp Crack
20%
Nanocrystalline Diamond
20%
Reentrant Corner
20%
Fixed Configuration
20%
Theoretical-experimental Method
20%
Engineering
System Component
100%
Microelectromechanical System
100%
System Structure
40%
Experimental Result
20%
Focused Ion Beam
20%
Theoretical Method
20%
Nanocrystalline
20%
Diamond
20%
Sharp Crack
20%
Blunt Notch
20%
Thin Films
20%
Fracture Mechanics
20%