Preparation and characterization of superhard CNX/ZrN multilayers

Mei Ling Wu; Xi Wei Lin; Vinayak P. Dravid; Yip Wah Chung; Ming Show Wong; William D. Sproul

doi:10.1116/1.580784

Preparation and characterization of superhard CN_X/ZrN multilayers

Mei Ling Wu, Xi Wei Lin, Vinayak P. Dravid, Yip Wah Chung^*, Ming Show Wong, William D. Sproul

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

A dual-cathode, unbalanced dc magnetron sputtering system was used to grow CN_x/ZrN multilayers on Si and polished M1 steel substrates at ambient temperature. Nanoindentation results showed that, under apprepriate conditions, it is possible to get CN_x/ZrN multilayer coatings with hardness in the 50 GPa regime and modulus up to 410 GPa. X-ray diffraction studies revealed a strong correlation between hardness and the occurrence of (111) texture of ZrN. Cross-sectional transmission electron microscopy showed a high degree of crystallinity throughout the coating without obvious voids. These multilayers are crystalline only at small bilayer thicknesses on the order of 2 nm.

Original language	English (US)
Pages (from-to)	946-950
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	15
Issue number	3
DOIs	https://doi.org/10.1116/1.580784
State	Published - 1997

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "A dual-cathode, unbalanced dc magnetron sputtering system was used to grow CNx/ZrN multilayers on Si and polished M1 steel substrates at ambient temperature. Nanoindentation results showed that, under apprepriate conditions, it is possible to get CNx/ZrN multilayer coatings with hardness in the 50 GPa regime and modulus up to 410 GPa. X-ray diffraction studies revealed a strong correlation between hardness and the occurrence of (111) texture of ZrN. Cross-sectional transmission electron microscopy showed a high degree of crystallinity throughout the coating without obvious voids. These multilayers are crystalline only at small bilayer thicknesses on the order of 2 nm.",

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AU - Wu, Mei Ling

AU - Lin, Xi Wei

AU - Dravid, Vinayak P.

AU - Chung, Yip Wah

AU - Wong, Ming Show

AU - Sproul, William D.

PY - 1997

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AB - A dual-cathode, unbalanced dc magnetron sputtering system was used to grow CNx/ZrN multilayers on Si and polished M1 steel substrates at ambient temperature. Nanoindentation results showed that, under apprepriate conditions, it is possible to get CNx/ZrN multilayer coatings with hardness in the 50 GPa regime and modulus up to 410 GPa. X-ray diffraction studies revealed a strong correlation between hardness and the occurrence of (111) texture of ZrN. Cross-sectional transmission electron microscopy showed a high degree of crystallinity throughout the coating without obvious voids. These multilayers are crystalline only at small bilayer thicknesses on the order of 2 nm.

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Preparation and characterization of superhard CN_X/ZrN multilayers

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