Preparation of site specific transmission electron microscopy plan-view specimens using a focused ion beam system

R. M. Langford*, Y. Z. Huang, S. Lozano-Perez, J. M. Titchmarsh, A. K. Petford-Long

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

29 Scopus citations

Abstract

A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.

Original languageEnglish (US)
Pages (from-to)755-758
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume19
Issue number3
DOIs
StatePublished - May 1 2001
Event13th International Vaccum Microelectronics Conference - Guangzhou, China
Duration: Aug 14 2000Aug 17 2000

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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