Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling

R. M. Langford*, A. K. Petford-Long

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

220 Scopus citations

Abstract

The transmission electron microscopy (TEM) cross-section specimens were prepared by using focused ion beam (FIB) milling through liftout and trench techniques. The main advantage of trench technique over the lift out was higher yield while the main advantage of cross-section specimens is that their geometry enabled them to tilt through large angles in TEM. Electron beam deposition and plasma beam deposition were used to reduce the damage to the top surface due to in-situ deposition of the protecting/planarizing metal. For the prevention of sidewalls, gas assisted etching (GAE), broad ion beam (BIB) and low energy milling were used.

Original languageEnglish (US)
Pages (from-to)2186-2193
Number of pages8
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number5
DOIs
StatePublished - Sep 2001

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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