Preparation of Y-Ba-Cu-O thin films on MgO by dc magnetron sputtering from a stoichiometric Y1Ba2Cu3O7-δ target

S. J. Lee*, E. D. Rippert, B. Y. Jin, S. N. Song, S. J. Hwu, K. Poeppelmeier, J. B. Ketterson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

Y-Ba-Cu-O thin films have been deposited on MgO substrates by dc magnetron sputtering from a stoichiometric YBa2Cu3O 7-δ target, after which they are subjected to a short heat treatment. Zero resistance is routinely achieved near 60 K, and one film shows zero resistance at 68.0 K.

Original languageEnglish (US)
Pages (from-to)1194-1196
Number of pages3
JournalApplied Physics Letters
Volume51
Issue number15
DOIs
StatePublished - 1987

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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