PRIMARY AND SECONDARY ION DEPOSITION OF EPITAXIAL SEMICONDUCTOR FILMS FROM LASER-INDUCED PLASMAS.

D. Lubben*, S. A. Barnett, K. Suzuki, J. E. Greene

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy