Production and performance of multilayer coated conic sections

Melville P Ulmer, R. I. Altkron, M. E. Graham, A. Madan, Y. S. Chu

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Previously we have reported on our work on coating a truncated-cone-shaped "engineering" (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated-cone geometry. We have advanced to using a high quality (about 0.5 nm) smooth truncated cone. We report our latest advances in refining our fabrication techniques and the results of X-ray measurements. The X-ray measurements made at the Argonne APS SRI-CAT 2-BM-B beam-line were at 10 and 30 keV. The results showed that we had produced excellent Si/W multilayers on the inside of a 10 cm long by about 10 cm diameter truncated cone shaped mirror. We estimate the reflectivity of the layers at the primary Bragg peak to be well above 10%. We also show that the multilayers were uniform around the mirror.

Original languageEnglish (US)
Pages (from-to)127-133
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4496
DOIs
StatePublished - Jan 1 2002

Keywords

  • Electroforming
  • Multilayers
  • X-ray optics
  • X-ray reflectivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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