Production and performance of multilayer coated conic sections

Melville P Ulmer; R. I. Altkron; M. E. Graham; A. Madan; Y. S. Chu

doi:10.1117/12.454365

Production and performance of multilayer coated conic sections

Melville P Ulmer, R. I. Altkron, M. E. Graham, A. Madan, Y. S. Chu

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Previously we have reported on our work on coating a truncated-cone-shaped "engineering" (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated-cone geometry. We have advanced to using a high quality (about 0.5 nm) smooth truncated cone. We report our latest advances in refining our fabrication techniques and the results of X-ray measurements. The X-ray measurements made at the Argonne APS SRI-CAT 2-BM-B beam-line were at 10 and 30 keV. The results showed that we had produced excellent Si/W multilayers on the inside of a 10 cm long by about 10 cm diameter truncated cone shaped mirror. We estimate the reflectivity of the layers at the primary Bragg peak to be well above 10%. We also show that the multilayers were uniform around the mirror.

Original language	English (US)
Pages (from-to)	127-133
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4496
DOIs	https://doi.org/10.1117/12.454365
State	Published - Jan 1 2002

Keywords

Electroforming
Multilayers
X-ray optics
X-ray reflectivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.454365

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title = "Production and performance of multilayer coated conic sections",

abstract = "Previously we have reported on our work on coating a truncated-cone-shaped {"}engineering{"} (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated-cone geometry. We have advanced to using a high quality (about 0.5 nm) smooth truncated cone. We report our latest advances in refining our fabrication techniques and the results of X-ray measurements. The X-ray measurements made at the Argonne APS SRI-CAT 2-BM-B beam-line were at 10 and 30 keV. The results showed that we had produced excellent Si/W multilayers on the inside of a 10 cm long by about 10 cm diameter truncated cone shaped mirror. We estimate the reflectivity of the layers at the primary Bragg peak to be well above 10%. We also show that the multilayers were uniform around the mirror.",

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AU - Ulmer, Melville P

AU - Altkron, R. I.

AU - Graham, M. E.

AU - Madan, A.

AU - Chu, Y. S.

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N2 - Previously we have reported on our work on coating a truncated-cone-shaped "engineering" (not high quality in terms of smoothness) mandrel and have removed the layers, intact, on the inside of an electroform with a cylindrical, truncated-cone geometry. We have advanced to using a high quality (about 0.5 nm) smooth truncated cone. We report our latest advances in refining our fabrication techniques and the results of X-ray measurements. The X-ray measurements made at the Argonne APS SRI-CAT 2-BM-B beam-line were at 10 and 30 keV. The results showed that we had produced excellent Si/W multilayers on the inside of a 10 cm long by about 10 cm diameter truncated cone shaped mirror. We estimate the reflectivity of the layers at the primary Bragg peak to be well above 10%. We also show that the multilayers were uniform around the mirror.

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