Progress in MEMS and micro systems research

Chang Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

MEMS technology has revolutionized microfabrication, and the sensors and actuators industries. What is the state of the art of MEMS applications that use ceramic materials? what are major trends of development for the MEMS field in the future? this talk will present a broad and timely overview for conference attendees that address these twoquestions.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005
Pages104-113
Number of pages10
StatePublished - Dec 1 2005
Event1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005 - Baltimore, MD, United States
Duration: Apr 10 2005Apr 13 2005

Other

Other1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005
CountryUnited States
CityBaltimore, MD
Period4/10/054/13/05

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Progress in MEMS and micro systems research'. Together they form a unique fingerprint.

Cite this