Abstract
MEMS technology has revolutionized microfabrication, and the sensors and actuators industries. What is the state of the art of MEMS applications that use ceramic materials? what are major trends of development for the MEMS field in the future? this talk will present a broad and timely overview for conference attendees that address these twoquestions.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005 |
| Pages | 104-113 |
| Number of pages | 10 |
| State | Published - Dec 1 2005 |
| Event | 1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005 - Baltimore, MD, United States Duration: Apr 10 2005 → Apr 13 2005 |
Other
| Other | 1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005 |
|---|---|
| Country/Territory | United States |
| City | Baltimore, MD |
| Period | 4/10/05 → 4/13/05 |
ASJC Scopus subject areas
- Ceramics and Composites
- Materials Chemistry