Properties of epitaxial barium titanate thin films using a highly volatile Ba(hfa)2triglyme precursor

Young Kyu Jeong, Bruce W Wessels

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


Ferroelectric barium titanate (BaTiO3) epitaxial films were grown by metal-organic chemical vapor deposition using a new precursor Ba(hfa)2·triglyme. The precursor has both a low melting point and a stable vapor pressure. The as-deposited layers are highly tensile-strained up to a thickness of 300 nm due to the lattice mismatch between epitaxial BaTiO3 and the MgO (100) substrate. Thus, the thin films are predominantly a-domain. However, as the thickness further increases, the tensile strain relaxes by creating a mixed a- and c-domain structure. The dependence of domain structure on film thicknesses was investigated with high-resolution x-ray diffraction and a piezoelectric force microscopy and ferroelectric hysteresis measurements.

Original languageEnglish (US)
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Issue number5
StatePublished - Sep 1 2015

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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