Properties of multilayer transparent conducting oxide films

E. J.J. Martin; M. Yan; M. Lane; J. Ireland; C. R. Kannewurf; R. P.H. Chang

doi:10.1016/j.tsf.2004.01.103

Properties of multilayer transparent conducting oxide films

E. J.J. Martin^*, M. Yan, M. Lane, J. Ireland, C. R. Kannewurf, R. P.H. Chang

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

92 Scopus citations

Abstract

Multilayered transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance in the visible spectrum. Double-layered TCO structures consisting of Sn-doped CdO and Sn-doped CdIn₂O₄, Cd-rich Cd₂SnO ₄, or Ga-doped ZnO are discussed. By optimizing the thickness of the individual layers and the doping levels within those layers, an effective conductivity of 20600 S/cm and an average transmittance larger than 85% in the 400-700 nm range have been achieved for films epitaxially grown on MgO substrates. Bi-layer films consisting of Sn-doped CdO and Ga-doped ZnO have also been deposited on plastic substrates at room temperature with resistivities of ∼1×10^-4 Ω cm and an average transmittance of 80-85% in the visible range. These properties are attractive for future TCO applications.

Original language	English (US)
Pages (from-to)	309-315
Number of pages	7
Journal	Thin Solid Films
Volume	461
Issue number	2
DOIs	https://doi.org/10.1016/j.tsf.2004.01.103
State	Published - Aug 16 2004

Keywords

Cadmium
Indium tin oxide
Laser ablation
Zinc oxide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2004.01.103

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title = "Properties of multilayer transparent conducting oxide films",

abstract = "Multilayered transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance in the visible spectrum. Double-layered TCO structures consisting of Sn-doped CdO and Sn-doped CdIn2O4, Cd-rich Cd2SnO 4, or Ga-doped ZnO are discussed. By optimizing the thickness of the individual layers and the doping levels within those layers, an effective conductivity of 20600 S/cm and an average transmittance larger than 85% in the 400-700 nm range have been achieved for films epitaxially grown on MgO substrates. Bi-layer films consisting of Sn-doped CdO and Ga-doped ZnO have also been deposited on plastic substrates at room temperature with resistivities of ∼1×10-4 Ω cm and an average transmittance of 80-85% in the visible range. These properties are attractive for future TCO applications.",

keywords = "Cadmium, Indium tin oxide, Laser ablation, Zinc oxide",

author = "Martin, {E. J.J.} and M. Yan and M. Lane and J. Ireland and Kannewurf, {C. R.} and Chang, {R. P.H.}",

note = "Funding Information: This work was supported in part by the US Department of Energy through the National Renewable Energy Laboratory (AAD-9-18668-05), USDC (RFP 01-70), and by the NSF (CHE 0201767). The authors acknowledge the use of Northwestern MRSEC central facilities. ",

year = "2004",

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doi = "10.1016/j.tsf.2004.01.103",

language = "English (US)",

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AU - Martin, E. J.J.

AU - Yan, M.

AU - Lane, M.

AU - Ireland, J.

AU - Kannewurf, C. R.

AU - Chang, R. P.H.

N1 - Funding Information: This work was supported in part by the US Department of Energy through the National Renewable Energy Laboratory (AAD-9-18668-05), USDC (RFP 01-70), and by the NSF (CHE 0201767). The authors acknowledge the use of Northwestern MRSEC central facilities.

PY - 2004/8/16

Y1 - 2004/8/16

N2 - Multilayered transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance in the visible spectrum. Double-layered TCO structures consisting of Sn-doped CdO and Sn-doped CdIn2O4, Cd-rich Cd2SnO 4, or Ga-doped ZnO are discussed. By optimizing the thickness of the individual layers and the doping levels within those layers, an effective conductivity of 20600 S/cm and an average transmittance larger than 85% in the 400-700 nm range have been achieved for films epitaxially grown on MgO substrates. Bi-layer films consisting of Sn-doped CdO and Ga-doped ZnO have also been deposited on plastic substrates at room temperature with resistivities of ∼1×10-4 Ω cm and an average transmittance of 80-85% in the visible range. These properties are attractive for future TCO applications.

AB - Multilayered transparent conducting oxide (TCO) film structures have been designed and fabricated to achieve both high conductivity and high transmittance in the visible spectrum. Double-layered TCO structures consisting of Sn-doped CdO and Sn-doped CdIn2O4, Cd-rich Cd2SnO 4, or Ga-doped ZnO are discussed. By optimizing the thickness of the individual layers and the doping levels within those layers, an effective conductivity of 20600 S/cm and an average transmittance larger than 85% in the 400-700 nm range have been achieved for films epitaxially grown on MgO substrates. Bi-layer films consisting of Sn-doped CdO and Ga-doped ZnO have also been deposited on plastic substrates at room temperature with resistivities of ∼1×10-4 Ω cm and an average transmittance of 80-85% in the visible range. These properties are attractive for future TCO applications.

KW - Cadmium

KW - Indium tin oxide

KW - Laser ablation

KW - Zinc oxide

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Properties of multilayer transparent conducting oxide films

Abstract

Keywords

ASJC Scopus subject areas

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