Prospects for aberration corrected electron precession

C. S. Own*, W. Sinkler, L. D. Marks

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

Recent developments in aberration control in the TEM have yielded a tremendous enhancement of direct imaging capabilities for studying atomic structures. However, aberration correction also has substantial benefits for achieving ultra-resolution in the TEM through reciprocal space techniques. Several tools are available that allow very accurate detection of the electron distribution in surfaces allowing precise atomic-scale characterization through statistical inversion techniques from diffraction data. The precession technique now appears to extend this capability to the bulk. This article covers some of the progress in this area and details requirements for a next-generation analytical diffraction instrument. An analysis of the contributions offered by aberration correction for precision electron precession is included.

Original languageEnglish (US)
Pages (from-to)534-542
Number of pages9
JournalUltramicroscopy
Volume107
Issue number6-7
DOIs
StatePublished - Jun 2007

Keywords

  • Aberration correction
  • Electron diffraction
  • Precession

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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