Pulsed excimer laser deposition of potassium titanyl phosphate films

Fulin Xiong; R. P.H. Chang; M. E. Hagerman; V. L. Kozhevnikov; K. R. Poeppelmeier; Haitain Zhou; G. K. Wong; J. B. Ketterson; C. W. White

doi:10.1063/1.111551

Pulsed excimer laser deposition of potassium titanyl phosphate films

Fulin Xiong^*, R. P.H. Chang, M. E. Hagerman, V. L. Kozhevnikov, K. R. Poeppelmeier, Haitain Zhou, G. K. Wong, J. B. Ketterson, C. W. White

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Nonlinear optical thin films of potassium titanyl phosphate (KTP) have been successfully fabricated by pulsed excimer laser deposition on substrates of sapphire and Si. The films deposited on sapphire substrates in the temperature ranges of 450-550°C show good crystallinity with preferential (100) and (011) orientations; on silicon, the films are polycrystalline. The stoichiometry of the films has been found to be Ti rich (about 20% higher). The effective refractive index of the films has been evaluated by spectroscopic ellipsometry with values between 1.75 and 2.0 in the spectral region 0.3-0.9 μm, consistent with the bulk value. The deposited films show a promising nonlinear optical response with high second-harmonic generation efficiency, comparable to that of single-crystal KTP.

Original language	English (US)
Pages (from-to)	161-163
Number of pages	3
Journal	Applied Physics Letters
Volume	64
Issue number	2
DOIs	https://doi.org/10.1063/1.111551
State	Published - 1994

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{b6acd70cc1f84f049fe4c3984b002a24,

title = "Pulsed excimer laser deposition of potassium titanyl phosphate films",

abstract = "Nonlinear optical thin films of potassium titanyl phosphate (KTP) have been successfully fabricated by pulsed excimer laser deposition on substrates of sapphire and Si. The films deposited on sapphire substrates in the temperature ranges of 450-550°C show good crystallinity with preferential (100) and (011) orientations; on silicon, the films are polycrystalline. The stoichiometry of the films has been found to be Ti rich (about 20% higher). The effective refractive index of the films has been evaluated by spectroscopic ellipsometry with values between 1.75 and 2.0 in the spectral region 0.3-0.9 μm, consistent with the bulk value. The deposited films show a promising nonlinear optical response with high second-harmonic generation efficiency, comparable to that of single-crystal KTP.",

author = "Fulin Xiong and Chang, {R. P.H.} and Hagerman, {M. E.} and Kozhevnikov, {V. L.} and Poeppelmeier, {K. R.} and Haitain Zhou and Wong, {G. K.} and Ketterson, {J. B.} and White, {C. W.}",

year = "1994",

doi = "10.1063/1.111551",

language = "English (US)",

volume = "64",

pages = "161--163",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "2",

}

TY - JOUR

T1 - Pulsed excimer laser deposition of potassium titanyl phosphate films

AU - Xiong, Fulin

AU - Chang, R. P.H.

AU - Hagerman, M. E.

AU - Kozhevnikov, V. L.

AU - Poeppelmeier, K. R.

AU - Zhou, Haitain

AU - Wong, G. K.

AU - Ketterson, J. B.

AU - White, C. W.

PY - 1994

Y1 - 1994

N2 - Nonlinear optical thin films of potassium titanyl phosphate (KTP) have been successfully fabricated by pulsed excimer laser deposition on substrates of sapphire and Si. The films deposited on sapphire substrates in the temperature ranges of 450-550°C show good crystallinity with preferential (100) and (011) orientations; on silicon, the films are polycrystalline. The stoichiometry of the films has been found to be Ti rich (about 20% higher). The effective refractive index of the films has been evaluated by spectroscopic ellipsometry with values between 1.75 and 2.0 in the spectral region 0.3-0.9 μm, consistent with the bulk value. The deposited films show a promising nonlinear optical response with high second-harmonic generation efficiency, comparable to that of single-crystal KTP.

AB - Nonlinear optical thin films of potassium titanyl phosphate (KTP) have been successfully fabricated by pulsed excimer laser deposition on substrates of sapphire and Si. The films deposited on sapphire substrates in the temperature ranges of 450-550°C show good crystallinity with preferential (100) and (011) orientations; on silicon, the films are polycrystalline. The stoichiometry of the films has been found to be Ti rich (about 20% higher). The effective refractive index of the films has been evaluated by spectroscopic ellipsometry with values between 1.75 and 2.0 in the spectral region 0.3-0.9 μm, consistent with the bulk value. The deposited films show a promising nonlinear optical response with high second-harmonic generation efficiency, comparable to that of single-crystal KTP.

UR - http://www.scopus.com/inward/record.url?scp=0027927428&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027927428&partnerID=8YFLogxK

U2 - 10.1063/1.111551

DO - 10.1063/1.111551

M3 - Article

AN - SCOPUS:0027927428

SN - 0003-6951

VL - 64

SP - 161

EP - 163

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

ER -

Pulsed excimer laser deposition of potassium titanyl phosphate films

Abstract

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