Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3

Cathleen A. Hoel, D. Bruce Buchholz, Robert P.H. Chang, Kenneth R. Poeppelmeier*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

Original languageEnglish (US)
Pages (from-to)2938-2942
Number of pages5
JournalThin Solid Films
Volume520
Issue number7
DOIs
StatePublished - Jan 31 2012

Funding

C.A.H. was funded through support of the Materials Research Science and Engineering Center at Northwestern University supported by the National Science Foundation under NSF Award Number DMR-050513 . The amorphous ZITO work is based upon work supported as part of ANSER, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0001059 . The authors gratefully acknowledge additional support for the crystalline ZITO work from the Department of Energy Basic Energy Sciences under Award no. DE-FG02-08ER46536. This work made use of the J.B. Cohen X-ray Facility supported by the MRSEC program of the National Science Foundation (DMR-0520513) at the Materials Research Center of Northwestern University. This work was supported by the Northwestern University Keck Biophysics Facility and a Cancer Center Support Grant (NCI CA060553) for the optical measurements. This work made use of the Electron Probe Instrumentation Center (EPIC) and the Optical Microscopy and Metallography Facility, which are supported by the NU-MRSEC program. C.A.H. thanks A. Raw and S. Pease-Dodson for the EDS measurements and J. Carsello and B. Stevens for help with the four-circle XRD scans and discussions. C.A.H. and K.R.P. thank T.O. Mason and D.E. Proffit for helpful discussions.

Keywords

  • Corundum
  • Epitaxial
  • Lattice matched
  • Pulsed-laser deposition
  • Transparent conducting oxide
  • Zinc indium tin oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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