Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3

Cathleen A. Hoel; D. Bruce Buchholz; Robert P.H. Chang; Kenneth R. Poeppelmeier

doi:10.1016/j.tsf.2011.10.012

Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In _{2 - 2x}Zn _xSn _xO ₃

Cathleen A. Hoel, D. Bruce Buchholz, Robert P.H. Chang, Kenneth R. Poeppelmeier^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Thin films of corundum-type In _{2 - 2x}Zn _xSn _xO ₃ (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO ₃ substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

Original language	English (US)
Pages (from-to)	2938-2942
Number of pages	5
Journal	Thin Solid Films
Volume	520
Issue number	7
DOIs	https://doi.org/10.1016/j.tsf.2011.10.012
State	Published - Jan 31 2012

Funding

C.A.H. was funded through support of the Materials Research Science and Engineering Center at Northwestern University supported by the National Science Foundation under NSF Award Number DMR-050513 . The amorphous ZITO work is based upon work supported as part of ANSER, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0001059 . The authors gratefully acknowledge additional support for the crystalline ZITO work from the Department of Energy Basic Energy Sciences under Award no. DE-FG02-08ER46536. This work made use of the J.B. Cohen X-ray Facility supported by the MRSEC program of the National Science Foundation (DMR-0520513) at the Materials Research Center of Northwestern University. This work was supported by the Northwestern University Keck Biophysics Facility and a Cancer Center Support Grant (NCI CA060553) for the optical measurements. This work made use of the Electron Probe Instrumentation Center (EPIC) and the Optical Microscopy and Metallography Facility, which are supported by the NU-MRSEC program. C.A.H. thanks A. Raw and S. Pease-Dodson for the EDS measurements and J. Carsello and B. Stevens for help with the four-circle XRD scans and discussions. C.A.H. and K.R.P. thank T.O. Mason and D.E. Proffit for helpful discussions.

Keywords

Corundum
Epitaxial
Lattice matched
Pulsed-laser deposition
Transparent conducting oxide
Zinc indium tin oxide

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2011.10.012

Cite this

@article{26b20d85bbaf4ccfb011adddc375771f,

title = "Pulsed-laser deposition of heteroepitaxial corundum-type ZITO: Cor-In 2 - 2xZn xSn xO 3",

abstract = "Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.",

keywords = "Corundum, Epitaxial, Lattice matched, Pulsed-laser deposition, Transparent conducting oxide, Zinc indium tin oxide",

author = "Hoel, {Cathleen A.} and Buchholz, {D. Bruce} and Chang, {Robert P.H.} and Poeppelmeier, {Kenneth R.}",

note = "Funding Information: C.A.H. was funded through support of the Materials Research Science and Engineering Center at Northwestern University supported by the National Science Foundation under NSF Award Number DMR-050513 . The amorphous ZITO work is based upon work supported as part of ANSER, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0001059 . The authors gratefully acknowledge additional support for the crystalline ZITO work from the Department of Energy Basic Energy Sciences under Award no. DE-FG02-08ER46536. This work made use of the J.B. Cohen X-ray Facility supported by the MRSEC program of the National Science Foundation (DMR-0520513) at the Materials Research Center of Northwestern University. This work was supported by the Northwestern University Keck Biophysics Facility and a Cancer Center Support Grant (NCI CA060553) for the optical measurements. This work made use of the Electron Probe Instrumentation Center (EPIC) and the Optical Microscopy and Metallography Facility, which are supported by the NU-MRSEC program. C.A.H. thanks A. Raw and S. Pease-Dodson for the EDS measurements and J. Carsello and B. Stevens for help with the four-circle XRD scans and discussions. C.A.H. and K.R.P. thank T.O. Mason and D.E. Proffit for helpful discussions.",

year = "2012",

month = jan,

day = "31",

doi = "10.1016/j.tsf.2011.10.012",

language = "English (US)",

volume = "520",

pages = "2938--2942",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "7",

}

TY - JOUR

T1 - Pulsed-laser deposition of heteroepitaxial corundum-type ZITO

T2 - Cor-In 2 - 2xZn xSn xO 3

AU - Hoel, Cathleen A.

AU - Buchholz, D. Bruce

AU - Chang, Robert P.H.

AU - Poeppelmeier, Kenneth R.

N1 - Funding Information: C.A.H. was funded through support of the Materials Research Science and Engineering Center at Northwestern University supported by the National Science Foundation under NSF Award Number DMR-050513 . The amorphous ZITO work is based upon work supported as part of ANSER, an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0001059 . The authors gratefully acknowledge additional support for the crystalline ZITO work from the Department of Energy Basic Energy Sciences under Award no. DE-FG02-08ER46536. This work made use of the J.B. Cohen X-ray Facility supported by the MRSEC program of the National Science Foundation (DMR-0520513) at the Materials Research Center of Northwestern University. This work was supported by the Northwestern University Keck Biophysics Facility and a Cancer Center Support Grant (NCI CA060553) for the optical measurements. This work made use of the Electron Probe Instrumentation Center (EPIC) and the Optical Microscopy and Metallography Facility, which are supported by the NU-MRSEC program. C.A.H. thanks A. Raw and S. Pease-Dodson for the EDS measurements and J. Carsello and B. Stevens for help with the four-circle XRD scans and discussions. C.A.H. and K.R.P. thank T.O. Mason and D.E. Proffit for helpful discussions.

PY - 2012/1/31

Y1 - 2012/1/31

N2 - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

AB - Thin films of corundum-type In 2 - 2xZn xSn xO 3 (cor-ZITO) were grown on lattice-matched substrates using pulsed laser deposition. The (001) of the corundum-type film grew heteroepitaxial to the (001) of a LiNbO 3 substrate with large grains along the in-plane and out-of-plane orientation characterized by glancing incidence X-ray diffraction and four-circle Φ-scans. A film with 34% In (metals basis) exhibited a wide optical gap of 3.9 eV and a modest conductivity of 134 S/cm, which suggests cor-ZITO is a potential low-cost transparent conducting oxide.

KW - Corundum

KW - Epitaxial

KW - Lattice matched

KW - Pulsed-laser deposition

KW - Transparent conducting oxide

KW - Zinc indium tin oxide

UR - http://www.scopus.com/inward/record.url?scp=84856407240&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84856407240&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2011.10.012

DO - 10.1016/j.tsf.2011.10.012

M3 - Article

AN - SCOPUS:84856407240

SN - 0040-6090

VL - 520

SP - 2938

EP - 2942

JO - Thin Solid Films

JF - Thin Solid Films

IS - 7

ER -